Traction molecular pump embedded inside the device

Abstract

The invention discloses a traction type molecular pump embedded in a device, which comprises a shell with a rotor installed inside, a first-stage molecular pump whose inner wall forms a helical suction groove and is coaxial with the rotor; and is interference-connected with the first-stage molecular pump The upper end surface of the third-stage molecular pump forms an upper annular flange, the lower end surface forms a plurality of air extraction grooves, a central through hole is formed in the middle, the inner wall of the central through hole forms a spiral air extraction groove, and the lower part of the third-stage molecular pump forms a ring Shaped assembly grooves; the lower end surface of the ring-shaped second-stage molecular pump that is interference-fitted with the assembly groove in the third-stage molecular pump forms a plurality of suction grooves, and the edge of the second-stage molecular pump forms a plurality of holes corresponding to the screw holes. groove. The invention has the characteristics of low processing cost and easy processing and installation; and the invention utilizes the characteristics of the high-speed rotation of the rotor itself, and can make the pressure in the device reach 10 without further improving the external evacuation capacity. -3 State of Pa.

Description

technical field [0001] The invention belongs to the field of molecular pumps, and in particular relates to a traction molecular pump embedded in a device. Background technique [0002] Although molecular pumps that have been widely used at present have good high vacuum and ultra-high vacuum performance, due to their working principle and pump structure limitations, they can only be connected in series with the equipment to be evacuated through pipes or flanges, and cannot be directly embedded in used in the device. For example, under normal circumstances, if a rotating part is to be rotated at high speed, it is often necessary to vacuumize its surroundings to ensure that it is in a good vacuum environment when rotating, thereby reducing frictional power consumption and heat generated by friction. However, if this rotating part is to work at a high speed, it cannot meet the requirements only by external evacuation device to evacuate it. Therefore, it is necessary to design a...

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Problems solved by technology

However, if this rotating part is to work at a high speed, it cannot meet the requirements only by external evacuation devices, so it is necessary to design a molecular pump system that can be directly embedded in the device to evacuate it. deal with

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