Adapter for vacuum pumps and associated pumping device
The technology of a pumping device and an adapter is applied to the components of the pumping device for elastic fluid, the pump device, the pump, etc., which can solve the problems of difficulty in adjusting multiple control valves at the same time, increasing the unevenness of the pumping speed, etc. Achieve the effect of reducing dead zone, improving pumping uniformity and reducing pressure loss
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[0049] Figure 1-4 A first embodiment of the pumping device 1 is shown.
[0050] The pumping device 1 includes an adapter for a vacuum pump 2 and at least two turbomolecular vacuum pumps 3. In the example shown, the number of turbomolecular vacuum pumps 3 is three.
[0051] The turbomolecular vacuum pumps 3 are identical and each include a fixed part in a manner known per se, in which the rotor 5 moves along the axis of rotation I at a higher speed (see image 3 Cross-sectional view) for axial rotation.
[0052] In the illustrative example, the turbo molecular vacuum pump 3 includes a turbo molecular stage 13 and a molecular stage 14 respectively.
[0053] At the turbomolecular stage 13, the fixed part includes a housing 4 including an inlet hole 6 at the first end coaxial with the axis of rotation, through which the pumped gas 7 passes.
[0054] According to an exemplary embodiment, the rotor 5 includes an upstream portion (in the direction of the airflow) of the turbine-type blade rot...
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