Method for measuring residual stress of pyrolytic carbon coating by virtue of X ray diffraction
A technique of residual stress, X-ray, applied in the direction of material analysis using radiation diffraction, etc.
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[0015] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0016] A method for X-ray diffraction measurement of pyrolytic carbon coating residual stress, the specific steps are as follows:
[0017] Step 1. Select the pyrolytic carbon coating material deposited on the graphite substrate prepared by the fluidized bed chemical vapor deposition process as an experimental sample, and carry out routine X-ray detection on the experimental sample to obtain a full spectrum of diffraction, such as figure 1 As shown, the maximum diffraction angle 2θ=78° of the diffraction peak was determined.
[0018] Step 2. Use the Rigaku Smartlab X-ray diffractometer, set the scan start angle to 2θ-2°, the scan end angle to 2θ+2°, the scan step to 0.02°, the scan speed to 1° / min, and count The time is 4.00s; the azimuth ψ is respectively selected as 0°, 10°, 20°, 30°, 40° and 50°, and the 2θ of the experimental sample corresponding to...
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