Broadband high-performance manual terahertz wave-absorbing material and design method thereof

A technology of a wave absorbing material and a design method, which is applied in the field of wireless energy transmission in the terahertz band, and can solve the problem of inability to realize large broadband absorption in the terahertz band.

Inactive Publication Date: 2014-10-01
ZHEJIANG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to provide a broadband high-performance artificial terahertz absorbing material and its design method for the defect that existing materials cannot achieve large broadband absorption in the terahertz band

Method used

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  • Broadband high-performance manual terahertz wave-absorbing material and design method thereof
  • Broadband high-performance manual terahertz wave-absorbing material and design method thereof
  • Broadband high-performance manual terahertz wave-absorbing material and design method thereof

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Embodiment 1

[0051] Absorbing effect of broadband high-performance artificial terahertz absorbing materials

[0052] According to the above design method, the sample was fabricated on the silicon wafer, see attached Image 6 , Figure 7 with Figure 8 , the engraving accuracy is better, by adjusting the focal length of the microscope, it can be seen that the metal structures of different sizes are located at different heights, and the structure of the layer and the layer is basically at the same position, which can basically achieve the effect of the pyramid in the design.

[0053] The test results of the microwave absorption performance of the sample under the terahertz time domain system (TDS Zomega-Z3) are as follows: Figure 5 , in the frequency band from 0.7THz to 2.3THz, more than 80% of the absorption is achieved. At the center wavelength, the reflectivity at normal incidence is ≤-15 dB, and the FWHM (full width at half maximum) of the absorption spectrum at normal incidence reach...

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Abstract

The invention discloses a broadband high-performance manual terahertz wave-absorbing material and a design method thereof. The broadband high-performance manual terahertz wave-absorbing material comprises a plurality of material units, wherein each material unit comprises chromium and photoresist SU-8, specifically, a metal chromium film is arranged on a substrate, and is used as an anti-transmission layer; the photoresist SU-8 and square arrays of the chromium are alternatively overlapped on the metal chromium film from bottom to top to form a pyramid shape; five layers of the square arrays of the chromium are arranged, wherein the thickness of each layer of 200nm, the side lengths of each square arrays are sequentially regularly reduced from bottom to top, and are sequentially 70 micrometers, 66 micrometers, 62 micrometers, 58 micrometers and 54 micrometers from bottom to top; the thickness of each layer of photoresist SU-8 is 4 micrometers; the period of the material units is 95 micrometers. According to the broadband high-performance manual terahertz wave-absorbing material, the large broadband absorbing effect of a terahertz wave band is realized, the process limit of making a conventional metamaterial is broken through, and the design and the making of a three-dimensional manual special medium of the terahertz wave band are completed.

Description

technical field [0001] The invention belongs to the field of wireless energy transmission in the terahertz band, and in particular relates to a broadband high-performance artificial terahertz wave-absorbing material and a design method thereof. Background technique [0002] Terahertz waves refer to electromagnetic waves with a frequency in the range of 0.1THz to 10THz, and a wavelength of about 0.03mm to 3mm, which is between microwave and infrared waves. THz waves have many characteristics that microwaves and light waves do not have. For example, THz photon energy is low, only a few electron volts, and will not cause damage to the detection substance; most non-metallic non-polar materials have little absorption of THz rays, making it possible to use It is used to detect the internal information of the material; the THz pulse source only includes several periods of electromagnetic oscillation, and the frequency band of a single pulse can cover the range from GHz to tens of T...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B32B15/092B32B37/00H01P1/20H01P11/00H05K9/00G02B5/00
Inventor 马云贵朱剑飞马兆峰
Owner ZHEJIANG UNIV
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