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Two-dimensional Nano Flexible Motion Platform

A motion platform, two-dimensional nanotechnology, applied in the parts, instruments, casings and other directions of the instrument, can solve the problem of large displacement error of the terminal platform, and achieve the effect of improving motion accuracy, high motion accuracy, and avoiding pressure instability.

Active Publication Date: 2017-02-15
TSINGHUA UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The existing two-dimensional nano-flexible motion platform has the defect of large displacement error of the terminal platform

Method used

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  • Two-dimensional Nano Flexible Motion Platform

Examples

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Embodiment Construction

[0028] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary and are intended to explain the present invention and should not be construed as limiting the present invention.

[0029] Refer below Figure 1-Figure 5 A two-dimensional nano-flexible motion platform 10 according to an embodiment of the present invention is described. Such as Figure 1-Figure 5 As shown, the two-dimensional nano-flexible motion platform 10 according to the embodiment of the present invention includes a base 101, a terminal platform 102, an X-direction driver (not shown in the figure), a Y-direction driver (not shown in the figure), a first X A flexible decoupling piece 1041 , a first flexible decoupling piece 1051 in the Y...

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Abstract

The invention discloses a two-dimensional nano flexible motion platform. The two-dimensional nano flexible motion platform comprises a base, a terminal platform located on the inner side of the edge of the base, an X-direction driver and a Y-direction driver, a first X-direction flexible decoupling part, a first Y-direction flexible decoupling part, a second X-direction flexible decoupling part and a second Y-direction flexible decoupling part, wherein the first X-direction flexible decoupling part extends in the X-direction and is respectively connected with the terminal platform and the X-direction driver, the first Y-direction flexible decoupling part extends in the Y-direction and is respectively connected with the base and the X-direction driver, the second X-direction flexible decoupling part extends in the X-direction and is respectively connected with the base and the Y-direction driver, and the second Y-direction flexible decoupling part extends in the X-direction and is respectively connected with the terminal platform and the Y-direction driver. The two-dimensional nano flexible motion platform has the advantages of being high in motion accuracy and the like.

Description

technical field [0001] The invention relates to a two-dimensional nano flexible motion platform. Background technique [0002] The existing two-dimensional nano-flexible motion platform has the defect of large displacement error of the terminal platform. Contents of the invention [0003] The present invention aims to solve one of the technical problems in the related art at least to a certain extent. Therefore, an object of the present invention is to propose a two-dimensional nano-flexible motion platform with advantages such as high motion precision. [0004] The two-dimensional nano-flexible motion platform according to the embodiment of the present invention includes: a base; a terminal platform, the terminal platform is located inside the edge of the base; an X-direction driver and a Y-direction driver; a first X-direction flexible decoupling member and a first Y-direction flexible decoupling member, the first X-direction flexible decoupling member extends along th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G12B9/10G12B5/00
Inventor 张震王鹏闫鹏张盼
Owner TSINGHUA UNIV
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