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Base for Quartz Boats for Exhaust Paper Sources

A quartz boat and paper source technology, applied in electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve problems such as low efficiency and troublesome operation, and achieve the effect of simple structure, flexible and convenient movement

Active Publication Date: 2017-01-04
JINAN JINGBO ELECTRONICS
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, when the paper source is discharged on the quartz boat, the quartz boat is placed flat on the table. In order to prevent the arranged silicon wafer and paper source from dumping, the operator needs to support the arranged silicon wafer and paper source with one hand, and the other Only one hand is used to place silicon wafers and paper sources, which is very cumbersome and inefficient

Method used

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  • Base for Quartz Boats for Exhaust Paper Sources
  • Base for Quartz Boats for Exhaust Paper Sources

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Embodiment Construction

[0013] Below in conjunction with accompanying drawing, the present invention is described in further detail:

[0014] Such as figure 1 and figure 2 As shown, the specific embodiment of the present invention includes a bottom plate 1 , a bracket 2 , a movable plate 3 , a baffle plate 4 and a stopper 5 .

[0015] The lower end of the bracket 2 is fixed on the rear end of the base plate 1, and the bracket 2 is at right angles to the base plate 1. Further, in order to ensure the strength of the overall structure, a reinforcing plate 6 is arranged between the base plate 1 and the bracket 2. The baffle 4 is arranged at the front end of the bottom plate 1 , preferably, the angle between the baffle 4 and the bottom plate 1 is an obtuse angle. A plurality of stoppers 5 are arranged behind the baffle plate 4, and the stoppers 5 are bar-shaped and arranged on the base plate 1 at equal intervals.

[0016] Protruding buttons 31 are provided on both sides of the upper end of the movable...

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PUM

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Abstract

A base for a quartz boat of a paper discharge source, which includes a bottom plate, a bracket, a movable plate, a baffle and a block, the lower end of the bracket is fixed at the rear end of the bottom plate, and the baffle is arranged at the front end of the bottom plate , a number of stoppers are arranged behind the baffle plate; convex buttons are arranged on both sides of the upper end of the movable plate, and a chute cooperating with the convex button is arranged on the inner side of the bracket. The invention is simple in structure, compact, flexible and convenient to move; the quartz boat can be tilted on it, so it does not need to be supported by hands when discharging paper sources and silicon wafers; its movable plate can adjust the slope, and the inclination of the quartz boat can be adjusted according to needs Spend.

Description

technical field [0001] The invention relates to a device for fixing a quartz boat in a silicon wafer processing technology, in particular to a base for a quartz boat of a paper discharge source. Background technique [0002] The paper source diffusion in the silicon wafer processing technology is to alternately stack the paper source and the silicon wafer on the diffusion quartz boat, and then form a P layer, a P-type region and an N-type region through high-temperature diffusion once. At present, when the paper source is discharged on the quartz boat, the quartz boat is placed flat on the table. In order to prevent the arranged silicon wafer and paper source from dumping, the operator needs to support the arranged silicon wafer and paper source with one hand, and the other Only one hand is used to place the silicon wafer and the paper source, which is very cumbersome and inefficient. Contents of the invention [0003] In order to overcome the above-mentioned shortcomings...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/673H01L21/683
Inventor 张馨马汝朝
Owner JINAN JINGBO ELECTRONICS
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