Circulation purification system for circular inert gas glove box special for MO source

Abstract

The invention discloses a circulation purification system for a circular inert gas glove box special for an MO source. During synthesis, purification and filling of the MO source in the glove box, a large amount of organic solvent and steam of the MO source certainly corrode a moisture meter and an oxygen meter in the glove box in the operating process of the circulation system of the glove box, and also influence the test accuracy, and the large amount of steam also shortens the service life of a water and oxygen purification column. Through the purification system provided by the invention, the organic solvent and the MO steam are effectively collected, the corrosion to the moisture meter and the oxygen meter are avoided, the reliability of a test value is ensured, and the service life of the water and oxygen purification column is prolonged. In the large-scale production, the circulation purification system not only facilitates the stability of the MO source product quality, but also lowers the operating cost of the glove box and lowers the production cost.

Description

technical field [0001] The invention relates to a purification system, in particular to a circulating purification system for an inert gas glove box dedicated to MO sources. Background technique [0002] Due to its special chemical properties, MO sources are extremely sensitive to trace amounts of water and oxygen. It needs to be synthesized and purified in an inert gas glove box with extremely low water and oxygen content (<1ppm). At present, the existing glove box circulation purification system is that the gas in the box first passes through the organic solvent adsorption column to realize the adsorption of organic solvent and MO vapor, and then passes through the water and oxygen purification column to realize the effective replacement of the water and oxygen content in the box. At the same time, the water and the oxygen analyzer are directly exposed to the atmosphere in the box. However, for such a circulation system, first of all, the volume of the organic solvent...

AI Technical Summary

Problems solved by technology

However, for such a circulation system, first of all, the volume of the organic solvent adsorption column itself is small, and the adsorption capacity is effective. At the same time, the glove box operation needs to be stopped when changing the adsorption material. It will inevitably affect the purification effect of the water and oxygen purification column and shorten its life. Moreover, because the water and oxygen analyzer are directly exposed to the atmosphere in the box, it will corrode the water and oxygen analyzer and affect the measurement accuracy.

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