Mask plate device and LCD (Liquid Crystal Display) adopting same

Abstract

The invention provides a mask plate device and an LCD (Liquid Crystal Display) adopting the same. The mask plate device comprises a mask plate, wherein a plurality of exposure areas are arranged in the mask plate; a shading belt is arranged on the periphery of each of the exposure areas; one or more scales are arranged at the junction of each exposure area and the corresponding shading belt. According to the device and the LCD adopting the same, scale patterns are formed on a baseplate through exposure, and whether the patterns on the mask plate are accurately transfer-printed on the baseplate or not is determined through reading the scales; during the manufacturing process of the LCD, through reading the scale patterns transfer-printed on the baseplate, the precision deviation situation of the current exposure is quantitatively confirmed, so that the related mechanisms controlling the exposure precision, the device parameters, the panel design parameters, and other factors are readjusted accordingly, and further, the loss is avoided, and the cost is reduced.

Description

technical field [0001] The invention relates to a mask plate device in the manufacturing process of a liquid crystal display panel and a liquid crystal display using the mask plate. Background technique [0002] The process technology of TFT-LCD manufacturing industry generally includes array process, box forming process, and module process. In the process of its realization, it must go through the project of exposure. The pattern is transferred to the substrate. [0003] figure 1 For the exposure mask, figure 2 for in figure 1 Schematic diagram of the substrate after transfer printing on the basis of the mask plate, figure 1 There are four exposure regions 11 in one mask plate 10 shown, and the exposure and etching of four panels are normally completed at one time; figure 2 A normal glass substrate 20 as shown can be cut into 8 or 16 or 20 liquid crystal display substrates, figure 2 Schematically cut into 20 liquid crystal display substrates 21 . [0004] Due to t...

AI Technical Summary

Problems solved by technology

Therefore, it often happens that the required pattern is blocked, or the unnecessary pattern is transferred to the substrate, such as Figure 4 as shown, Figure 4 Middle 41 means that the blind plate mechanism in the X positive direction shifts to the outside of the exposure and other exposure patterns appear, resulting in repeated exposures. Figure 4 Middle 42 means that the blind plate in the negative direction of X and the blind plate in the positive direction of Y are offset to the inside of the exposure and there is exposure residue

[0006] At present, there is no corresponding mechanism to judge the occurrence of abnormality after the exposure project, which leads to the detection of the product after the completion of the subsequent manufacturing process, resulting in continuous production of defective products; because there is no accurate measurement mechanism that can directly judge the accuracy In the case of offset, it is necessary to re-measure the abnormal area, which is time-consuming and labor-intensive

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