Detector probe for small space debris detection and sensor manufacturing method thereof

Abstract

The invention discloses a detector probe for small space debris detection and a sensor manufacturing method thereof. In the detector probe, a sensor and an electrode lead-out plate are installed in a cavity formed by assembling a base and a top plate. In the sensor, a bottom electrode and a top electrode are located on the top face of the sensor, so that the problem that a bottom electrode and a top electrode are located on the top face and the bottom face respectively and accordingly lead-out and installation of the electrodes are inconvenient is avoided. The top electrode and the bottom electrode are led to the electrode lead-out plate through a gold wire welding and pressing process, an outgoing line of the electrode lead-out plate leads out from a wire lead-out hole in the base, and the problem that thin aluminum electrodes are prone to being damaged due to the welding process and multiple complex wires can be solved.

Description

technical field [0001] The invention relates to the field of space debris detection, in particular to a MOS (Metal-Oxide-Silicon, Metal-Oxide-Silicon) detector probe for detecting tiny space debris and a method for preparing a sensor inside the detector probe. Background technique [0002] With the increasing frequency of human space activities, the number of space debris is increasing rapidly, and its impact on human space activities is increasing. Space debris, especially a large number of tiny space debris, can cause damage to the surface of optical instruments used in spacecraft, thermal coatings, and other components installed on the surface of the spacecraft. In order to grasp the spatial distribution characteristics of tiny space debris, many foreign space missions They all regard the on-orbit detection of tiny space debris as one of their main goals. [0003] The detector probe used in the Interplanetary Dust Experiment (IDE) carried out by the NASA Lagrange Researc...

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Problems solved by technology

[0007] In view of this, the present invention provides a MOS detector probe for the detection of tiny space debris, which can not only solve the problem that the entire detector probe fails when a single impact event causes a single MOS sensor to break or a short circuit fails, but also can Solve the problem that the thin aluminum electrodes are easy to be damaged due to the welding process and the many and complicated leads, and it can also solve the problem that the bottom electrode and the top electrode are respectively located on the top and bottom surfaces of the sensor, which makes it difficult to lead out and install the electrodes

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