Resonance device having drop resistive protection

A technology of seat body and quality block, which is applied in the direction of measuring devices, surveying and navigation, instruments, etc., can solve the problems of reducing resonance response, large damping effect, reducing the sensitivity and accuracy of gyroscope 50 angular velocity measurement, etc., to achieve good resonance ability, avoid pulling damage, good impact and drop resistance

Inactive Publication Date: 2015-03-18
吴名清 +1
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  • Summary
  • Abstract
  • Description
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Problems solved by technology

However, when the distance G1 and G2 are small, the damping effect caused by the air between the mass block 52 and the first seat body 56b is too large, which will cause the mass block 52 to be damped by the air and reduce the resonance response. , and reduce the angular velocity measurement sensitivity and accuracy of the gyroscope 50

Method used

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  • Resonance device having drop resistive protection
  • Resonance device having drop resistive protection
  • Resonance device having drop resistive protection

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Embodiment Construction

[0049] image 3 is a schematic cross-sectional view of a resonance device according to an embodiment of the present invention. Figure 4 yes image 3 A top view of some components of the resonance device. Please refer to image 3 and Figure 4 , the resonance device 100 of this embodiment is, for example, a MEMS gyroscope and includes a base 110 , a mass 120 and a plurality of elastic parts 130 . The base 110 includes a first base body 112, a second base body 114 and a connecting portion 116, the connecting portion 116 and the first base body 112 are edged together by an adhesive material 150a. image 3 The shown first direction D1 is glued together, and the connecting portion 116 and the second base body 112 are glued together along the first direction D1 through the adhesive material 150b, so that the connecting portion 116 is fixed on the first base body 112 and the second base body 114 between. The mass block 120 is located between the first seat body 112 and the sec...

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Abstract

A resonance device includes a base, a mass, a plurality of elastic portions and at least one end surface. The mass has at least one end surface. The elastic portions are connected between the mass and the base, in which the mass is adapted to resonate in a first direction such that the elastic portions are elastically deformed. The block portion is disposed at the base and extends towards the end surface to be aligned to the end surface, in which the gap between the base and the end surface in the first direction is greater than the gap between the block portion and the end surface in the first direction, and the block portion is adapted to block the end surface to limit the moving range of the mass.

Description

technical field [0001] The present invention relates to a resonance device, and in particular to a resonance device with the function of anti-drop protection. Background technique [0002] In recent years, driven by related electronic products such as smart phones, tablet PCs and somatosensory game consoles, micro-electromechanical (MEMS) inertial sensors, such as accelerometers and gyroscopes (gyroscope), etc., are widely used in these electronic products, making their market demand grow substantially year by year. Under the multi-party competition in the market, the requirements for the quality of MEMS inertial sensor-related applications have also increased. As far as the gyroscope is concerned, it measures the Coriolis force (Coriolis force) when the device rotates through the resonance operation of the mass block, and then calculates the angular velocity of the device. [0003] figure 1 It is a schematic cross-sectional view of an existing MEMS gyroscope. figure 2 ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/56
CPCG01C19/5712
Inventor 吴名清
Owner 吴名清
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