Functional device, electronic apparatus, and moving object
A technology for functional components and electronic equipment, which is applied in the direction of transmitting sensing components, measuring devices, instruments, etc. using electric/magnetic devices, and can solve problems such as not easy restriction, electrode damage, loss of electrostatic capacitance, etc.
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no. 1 approach
[0051] use figure 1 as well as figure 2 Functional elements related to the first embodiment will be described.
[0052] figure 1 It is a schematic plan view showing the functional elements according to the first embodiment. figure 2 for figure 1 An enlarged schematic view of the part indicated by the dotted line A1 in . For the convenience of explanation, in figure 1 as well as figure 2 The illustration of the cover body is omitted in . In addition, in figure 1 as well as figure 2 In FIG. 3 , an X-axis, a Y-axis, and a Z-axis are shown as three mutually orthogonal axes, and the Z-axis is an axis indicating the thickness direction in which the substrate and the element portion overlap.
[0053] Construction of functional element 1
[0054] figure 1 as well as figure 2 The shown functional element 1 of this embodiment has a substrate 2 , an element portion 3 provided on the substrate 2 , and a wiring portion 4 electrically connected to the element portion 3 .
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no. 2 approach
[0128] use image 3 as well as Figure 4 Functional elements of the second embodiment will be described.
[0129] image 3 It is a schematic plan view showing functional elements according to the second embodiment. Figure 4 for image 3 An enlarged schematic view of the part indicated by the dotted line A2 in . For the convenience of explanation, image 3 as well as Figure 4 The illustration of the cover body is omitted in . in addition, image 3 as well as Figure 4 In FIG. 3 , an X-axis, a Y-axis, and a Z-axis are shown as three mutually orthogonal axes, and the Z-axis is an axis indicating the thickness direction in which the substrate and the element portion overlap.
[0130] The functional element 1 a according to the second embodiment is different from the functional element 1 described in the first embodiment in that the stopper portion 60 is extended toward the movable portion 33 .
[0131] The other configurations and the like are substantially the same as t...
no. 3 approach
[0153] use Figure 5 Functional elements related to the third embodiment will be described.
[0154] Figure 5 It is a schematic plan view showing functional elements according to the third embodiment. Figure 5 For the convenience of description, the illustration of the cover is omitted. In addition, an X axis, a Y axis, and a Z axis are shown as three mutually orthogonal axes, and the Z axis is an axis indicating the thickness direction in which the substrate and the element portion overlap.
[0155] The functional element 1b according to the third embodiment is different from the functional element 1 described in the first embodiment in that the fixing portions 131, 132 and the stopper portion 160 are integrally provided.
[0156] The other structures and the like are substantially the same as those of the functional element 1 described in the first embodiment, so the same reference numerals and numbers are attached to the same structures and part of the description is o...
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