A high and low pressure conversion device for magnetron sputtering
A technology of high and low voltage conversion and magnetron sputtering, which is applied in sputtering plating, ion implantation plating, metal material coating technology, etc., and can solve problems such as personal injury, accumulated charge, and process complexity
Active Publication Date: 2017-02-22
广东空天科技研究院(南沙)
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Problems solved by technology
[0002] A variety of bias voltages are required in the process of magnetron sputtering. Due to the frequent switching of bias voltages, it is often necessary to switch the electrodes manually, which complicates the process of magnetron sputtering. Increases the risk of electric shock and personal injury
Moreover, most of the transfer switches used here are external switches that manually control the electrode transfer. Although there is a certain guarantee for the operator, it is still necessary to manually switch this high voltage, and the danger still exists.
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Embodiment Construction
[0018] The specific implementation of the high and low voltage conversion device disclosed in the present invention will be described in detail below in conjunction with the accompanying drawings.
[0019] Such as figure 1 As shown, the high-voltage and low-voltage conversion device disclosed in the present invention mainly includes an insulating support, an input part, an output part, a rotating shaft and a movable electrode combination system, and a sensor induction system. The electrodes of the input part and the output part are fixed on the insulating bracket, and the fixed electrodes of the output part are connected with the rotating shaft. The rotating shaft drives the stopper to rotate on the path of the sensor. The sensor controls the stop position, and the pneumatic device pops up the entire movable The electrode combination device connects the input and output electrodes, so that the circuit is connected and the switch function is realized.
[0020] Specifically, th...
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The invention discloses a high-low voltage conversion device which comprises an insulating support frame, an input part, an output part, a sensor induction device, a pneumatic bouncing device, a rotating shaft and a rotating system, wherein the electrodes of the input part and the output part are fixed on the insulating support frame, and the fixed electrode of the output part is connected with the rotating shaft of the rotating system together; and the rotating shaft drives a sensor induction plate to rotate on the path of the sensor induction device, is controlled by a sensor to stop rotation, and the integral rotating system is bounced by the pneumatic bouncing device to connect the input electrode and the output electrode, so that a switch function is achieved. The high-low voltage conversion device disclosed by the invention meets the requirement for multi-time bias voltage conversion in a magnetron sputtering film coating process. Compared with the traditional similar device, the high-low voltage conversion device disclosed by the invention is safer and more reliable in voltage conversion, can realize the switch with high-voltage insulation and 40-50 kV high-voltage impact characteristics and is provided with an automatic control system merged into a magnetron sputtering total control system.
Description
technical field [0001] The invention relates to a high-voltage and low-voltage conversion device used in the field of magnetron sputtering vacuum coating, which can meet the requirements of using different bias voltages in the coating process, and can reduce the risk of high-voltage electric shock during the high-voltage conversion process. Background technique [0002] A variety of bias voltages are required in the process of magnetron sputtering. Due to the frequent switching of bias voltages, it is often necessary to switch the electrodes manually, which complicates the process of magnetron sputtering. It will increase the risk of electric shock and cause personal injury. Moreover, most of the transfer switches used here are external switches for manually controlling the electrode transfer. Although there is a certain guarantee for the operator, the high voltage is still switched manually, and the danger still exists. Therefore, the switch control is further integrated i...
Claims
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IPC IPC(8): C23C14/35
CPCC23C14/35
Inventor 夏原李光朱洪亚
Owner 广东空天科技研究院(南沙)