Special helium detection method and special helium detection device of sensing element

Abstract

The invention discloses a special helium detection method and a special helium detection device of a sensing element. The sensing element (5) is placed on a seal ring (4) to be connected with a tooling base (3); the tooling base (3) is connected to a pressurization cover (1); the pressurization cover (1) is connected to a high-pressure air source (9), a pressure release valve (8) and a helium source (7); a helium detection instrument port (11) on the tooling base (3) is connected with a helium detection instrument; vacuumization and detection are carried out through the helium detection instrument; the helium detection instrument is used for applying specified helium pressure in the front of the sensing element (5) after switching to a fine detection state; the sealing property of the sensing element (5) is detected; once detection is completed, air is used for blowing and clearing a pressurization helium pipeline for carrying out the next detection. The helium pressure of about 1.8 MPa is applied to the front of the sensing element, and meanwhile the requirement that the leakage amount of components cannot be greater than 10<-10> mbar.l / s is detected, and the detection efficiency is high.

Description

technical field [0001] The invention relates to a helium detection method and device, in particular to a special helium detection method and device for a sensing element. Background technique [0002] The diaphragm assembly is used as the most critical sensing element in the sensor assembly, and its technical requirements are clear: 1.764MPa helium is applied along the front of the diaphragm, and the sealing of the assembly is checked at the same time, and the leakage is not greater than 1.33×10 -10 mbar.l / s. The only detection equipment that can detect tiny helium leaks is a helium detector, but at the same time it requires pressurized helium. The helium detector is very sensitive to helium, so it must be ensured that helium cannot escape into the device while being pressurized. Or the equipment is stored in the environment, otherwise the equipment is disturbed by helium, and it is impossible to judge whether the product’s sealing is qualified. The existing detection devic...

AI Technical Summary

Problems solved by technology

The only detection equipment that can detect tiny helium leaks is a helium detector, but at the same time it requires pressurized helium. The helium detector is very sensitive to helium, so it must be ensured that helium cannot escape into the device while being pressurized. Or the equipment is stored in the environment, otherwise the equipment is disturbed by helium, and it is impossible to judge whether the product’s sealing is qualified. The existing detection device is very complicated in operation procedures to ensure the pressure along the front of the diaphragm and the accuracy of the detection results, resulting in the detection of The efficiency is very low, and it takes at least 30 minutes to detect a sensing element

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