Unlock instant, AI-driven research and patent intelligence for your innovation.

Systems And Methods For Measuring High-intensity Light Beams

A technology for measuring light beams and light beams, which is applied in the field of systems with at least one intensity characteristic, and can solve problems such as the influence of measurement accuracy

Inactive Publication Date: 2015-04-08
ULTRATECH INT INC
View PDF5 Cites 2 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, as mentioned above, measurement accuracy suffers

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Systems And Methods For Measuring High-intensity Light Beams
  • Systems And Methods For Measuring High-intensity Light Beams
  • Systems And Methods For Measuring High-intensity Light Beams

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0050] Reference will now be made in detail to the various embodiments of the present disclosure, examples of which are illustrated in the accompanying drawings. Wherever possible, the same or similar reference numbers and symbols are used throughout the drawings to refer to the same or like parts. The figures are not necessarily to scale, and those skilled in the art will recognize where the figures have been simplified to illustrate key aspects of the disclosure.

[0051] The claims set forth below are incorporated into and constitute a part of this Detailed Description.

[0052] The entire disclosure of any publication or patent document mentioned herein is hereby incorporated by reference.

[0053] Cartesian coordinates are shown in some figures for reference purposes and are not intended to limit direction or orientation.

[0054] Figure 1A and Figure 1B are schematic diagrams of two example embodiments of a beam intensity measurement system (“system”) 10 . System 1...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

Systems and methods for measuring an intensity characteristic of a light beam are disclosed. The methods include directing the light beam into a prism assembly that includes a thin prism sandwiched by two transparent plates, and reflecting a portion of the light beam by total-internal-reflection surface to an integrating sphere while transmitting the remaining portion of the light beam through the two transparent plates to a beam dump. The method also includes detecting light captured by the integrating sphere and determining the intensity characteristic from the detected light.

Description

technical field [0001] The present disclosure relates to measuring the intensity of a light beam, and more particularly to systems and methods for measuring at least one intensity characteristic of a high intensity light beam. Background technique [0002] High intensity (or high optical power) beams are used in many applications, including thermal processing of semiconductor substrates. Most applications require high-intensity beams with well-defined intensity profiles. For example, in laser annealing applications, a high intensity beam forms a line image and has a generally Gaussian intensity distribution along the minor axis and a generally uniform intensity distribution along the major axis. Typical dimensions of a line image for thermal processing of semiconductor substrates are a few hundred microns wide (short axis) and tens of millimeters long (major axis). The amount of power in such line images can reach several kilowatts. [0003] It is difficult to accurately ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01J1/42
CPCG01J1/0407G01J2001/0481G01J1/4257G01J1/0477G01J2001/4261G01J1/0414G02B5/04G02B27/108
Inventor S·阿尼基谢威D·盖恩斯
Owner ULTRATECH INT INC