A Fast Fault Detection Method Based on Random Projection and k-Nearest Neighbors

A technology of random projection and fault detection, applied in electrical testing/monitoring, testing/monitoring control systems, instruments, etc., can solve problems such as high computational complexity, missed reports, and inability to guarantee sample distances, to ensure detection performance, effective Monitoring the effect

Active Publication Date: 2017-06-23
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Although, PC-kNN can solve the problem of high computational complexity
However, the distance between samples after PCA dimensionality reduction cannot be guaranteed, that is, the distance between samples in the original space cannot be guaranteed in the pivot subspace, which will inevitably affect the detection performance of kNN in the pivot subspace, because kNN uses the distance between samples for fault detection
That is to say, samples that are judged to be faulty in the original space (obviously deviate from the normal sample set) may be judged as normal samples in the pivot subspace, that is, false negatives; otherwise, the samples that are judged to be normal in the original space Samples (close to the normal sample set), may be judged as abnormal samples in the principal component subspace, that is, false positives

Method used

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  • A Fast Fault Detection Method Based on Random Projection and k-Nearest Neighbors
  • A Fast Fault Detection Method Based on Random Projection and k-Nearest Neighbors
  • A Fast Fault Detection Method Based on Random Projection and k-Nearest Neighbors

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Embodiment

[0056] The effectiveness of the method of the present invention will be described below in conjunction with a specific semiconductor process example. The data of this process comes from three sets of experiments conducted by Texas Instruments in three months. There are 127 batches of available data, including 107 batches of normal data and 20 batches of fault data. The fault data is mainly obtained by artificially changing some Variations in variables such as power and pressure are caused. The sampling time points of each batch are 85, and a total of 17 non-set point process variables are selected for monitoring, as shown in Table 1.

[0057] Next, in conjunction with this specific process, the implementation steps of the present invention are described in detail:

[0058] Step 1: Offline training

[0059] 1) Collect data on normal operating conditions of the process. The three-dimensional array of the batch process in this example is expanded by batch

[0060] 2) Get a tw...

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Abstract

The invention discloses a quick fault detection method based on random projection and a k-nearest neighbor method, and belongs to the technical field of monitoring and diagnosis of an industrial process. The random projection and the k-nearest neighbor method are combined; by use of the advantage of distance retention of the random projection and the high performance of the k-nearest neighbor method for processing non-Gaussian, nonlinear and multi-working-condition problems of data, the industrial process is monitored. Compared with other methods in the prior art, the method disclosed by the invention has the advantages that the calculation complexity can be reduced, furthermore, the detection performance of the k-nearest neighbor method in a dimension reduction sub space can be guaranteed, and quick and accurate detection can be realized.

Description

technical field [0001] The invention belongs to the field of industrial process monitoring and fault diagnosis, in particular to a fast fault detection method based on random projection and k-nearest neighbor. Background technique [0002] For process monitoring and fault diagnosis problems, most traditional methods use multivariable statistical process monitoring technology (Multivariable Statistical Process Monitoring, MSPM), in which principal component analysis (Principal Component Analysis, PCA) and partial least squares (Partial Least Squares, PLS) The representative methods have been successfully applied in industrial process monitoring. The traditional MSPM method assumes that the process data obeys Gaussian distribution, the relationship between variables is linear and the data comes from a single operating condition, but the actual measurement data is difficult to meet these assumptions, and often presents non-Gaussian, nonlinear and multi-working conditions and o...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05B23/02
CPCG05B23/0278
Inventor 杨春节周哲文成林
Owner ZHEJIANG UNIV
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