Flexible pressure sensing element, sensor and manufacturing method thereof

Abstract

The invention discloses a flexible pressure sensing piece, a sensor and a manufacturing method of the flexible pressure sensing piece. A low-cost semiconductor processing technology is applied to manufacturing technologies of the high-flexibility piezoresistive type flexible pressure sensing piece and the sensor, a groove is manufactured in a semiconductor rigid substrate to form a tooth-shaped structure of a flexible substrate, a conductive material layer is coated on the surface of the flexible substrate, electrodes are manufactured, and therefore the flexible pressure sensing piece can be manufactured. Through the method, the flexibility of the flexible pressure sensor can be effectively regulated, the size of the device can be customized according to different requirements, and therefore miniaturization of the device can be achieved more easily. In addition, the flexible pressure sensor can be in intelligent connection with other devices quite conveniently, and therefore intelligentization of the device is guaranteed.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a flexible pressure sensing element, a sensor and a manufacturing method thereof. Background technique [0002] In recent years, with the rapid development of smart wearable products, flexible sensors have gradually become one of the hot topics explored by researchers. Among them, flexible pressure sensors have received more and more attention, which can be potentially applied to the construction of artificial electronic skin. It has a very broad market prospect in the future health and medical field. In addition, flexible pressure sensors are also core components in flexible touch screen displays and intelligent robot applications, all of which indicate the potential application value of flexible pressure sensors. [0003] At present, the research on flexible pressure sensors can be based on a variety of working principles, including capacitive, piezoresistive, piezoelectric, et...

AI Technical Summary

Problems solved by technology

Although this patent can solve the technical problem of fabric-type pressure sensor manufacturing difficulties, the cost is high and the process is complicated, and the miniaturization of the device cannot be realized, nor does it provide enlightenment for the intelligent connection between the sensor and other devices

[0005] Recent research results have reported that a highly sensitive flexible pressure sensor was prepared using silk as a template, and it was used to monitor health indicators such as pulse and heartbeat of the human body (X.Wang, et.al, Adv. Mater. 2014, 26, 1336–1342 ), which is a great breakthrough in the research on the application of flexible pressure sensors. It makes full use of the low-cost preparation process to realize a flexible sensor with high sensitivity, but the main problem it faces is that it cannot further realize the miniaturization of the device, and in the follow-up How to realize the intelligent connection between sensors and other devices in the application will also face great challenges

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