Flexible pressure sensing piece, sensor and manufacturing method of flexible pressure sensing piece

A manufacturing method and technology of sensing parts, applied in the field of sensors, can solve the problems of unrevealed intelligent connection of sensors, complicated process, high cost, etc., and achieve the effect of important application value

Active Publication Date: 2015-04-22
SHANGHAI INTEGRATED CIRCUIT RES & DEV CENT +1
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although this patent can solve the technical problem of fabric-type pressure sensor manufacturing difficulties, the cost is high and the process is complicated, and the miniaturization of the device cannot be realized, nor does it provide enlightenment for the intelligent connection between the sensor and other devices
[0005] Recent research results have reported that a highly sensitive flexible pressure sensor was prepared using silk as a template, and it was used to monitor health indicators such as pulse and heartb

Method used

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  • Flexible pressure sensing piece, sensor and manufacturing method of flexible pressure sensing piece
  • Flexible pressure sensing piece, sensor and manufacturing method of flexible pressure sensing piece
  • Flexible pressure sensing piece, sensor and manufacturing method of flexible pressure sensing piece

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[0031] See figure 1 The flexible pressure sensor of this embodiment includes a flexible substrate 3, and the flexible substrate 3 has a tooth-shaped structure area 31 including a plurality of tooth-shaped structures 311 and an electrode area 32. The surface of the tooth-shaped structure area 31 and the electrode area 32 are covered There is a connected conductive material layer 4, and an electrode 5 is also provided on the surface of the conductive material layer of the electrode area 32.

[0032] Please keep reading figure 2 , The flexible pressure sensor of this embodiment includes two figure 1 In the flexible pressure sensing element of the embodiment, the multiple tooth structures 311 of the tooth structure area 31 of the two flexible pressure sensing elements are cross-coupled and connected to each other, that is, the tooth structure is between the tooth structure of the other sensor element The grooves are matched, such as figure 2 As shown, so that the conductive material...

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Abstract

The invention discloses a flexible pressure sensing piece, a sensor and a manufacturing method of the flexible pressure sensing piece. A low-cost semiconductor processing technology is applied to manufacturing technologies of the high-flexibility piezoresistive type flexible pressure sensing piece and the sensor, a groove is manufactured in a semiconductor rigid substrate to form a tooth-shaped structure of a flexible substrate, a conductive material layer is coated on the surface of the flexible substrate, electrodes are manufactured, and therefore the flexible pressure sensing piece can be manufactured. Through the method, the flexibility of the flexible pressure sensor can be effectively regulated, the size of the device can be customized according to different requirements, and therefore miniaturization of the device can be achieved more easily. In addition, the flexible pressure sensor can be in intelligent connection with other devices quite conveniently, and therefore intelligentization of the device is guaranteed.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a flexible pressure sensing element, a sensor and a manufacturing method thereof. Background technique [0002] In recent years, with the rapid development of smart wearable products, flexible sensors have gradually become one of the hot topics explored by researchers. Among them, flexible pressure sensors have received more and more attention, which can be potentially applied to the construction of artificial electronic skin. It has a very broad market prospect in the future health and medical field. In addition, flexible pressure sensors are also core components in flexible touch screen displays and intelligent robot applications, all of which indicate the potential application value of flexible pressure sensors. [0003] At present, the research on flexible pressure sensors can be based on a variety of working principles, including capacitive, piezoresistive, piezoelectric, et...

Claims

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Application Information

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IPC IPC(8): A61B5/00
CPCA61B5/02A61B5/6801A61B2562/00A61B2562/0247
Inventor 郭奥胡少坚周伟
Owner SHANGHAI INTEGRATED CIRCUIT RES & DEV CENT
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