Workpiece holder in ion beam polishing device

Abstract

The invention discloses a workpiece holder in an ion beam polishing device. The workpiece holder comprises a circular reference disc, clamping jaws, a rough adjustment mechanism and a fine adjustment mechanism. Multiple concentric circle marks with the reference disc as the concentric center are arranged on the lower surface of the circular reference disc, wherein the marks serve as rough adjustment references. The clamping jaws can be driven by the rough adjustment mechanism and the fine adjustment mechanism to radially move on the reference disc. When a workpiece is clamped, it is guaranteed that the center of the workpiece is aligned with the center of a clamping disc, so that the workpiece is accurately located and clamped. The workpiece holder has the advantages of being convenient and quick to operate, the workpiece can be rapidly clamped, and device machining efficiency can be improved to a great extent.

Description

technical field [0001] The invention belongs to the field of precision optical parts processing, and in particular relates to a workpiece fixture in ion beam polishing equipment. Background technique [0002] As a non-contact deterministic removal processing method, ion beam polishing has the advantages of high processing precision and no residual stress, and is now more and more used in the processing of high-precision optical components. During the ion beam polishing process, the high-energy ions generated by the ion source bombard the surface of the optical element to remove materials, and the bombardment position and time correspond to each other. The calculation of the processing dwell time needs to be based on accurate position coordinates. Therefore, the precise positioning of the workpiece in the ion beam polishing equipment is closely related to the processing accuracy. In the ion beam polishing equipment, the positioning of the workpiece is based on the center of ...

AI Technical Summary

Problems solved by technology

[0003] The patent application number 201110329856.X discloses a workpiece clamping device in the process of ion beam polishing. Although the specific structure and clamping method are introduced in detail, and the precise clamping of the workpiece can be realized, the described method uses a dial gauge The way of playing the meter is very inconvenient in the actual operation process. It needs a series of steps such as meter installation, meter adjustment, and back and forth adjustment. It takes a lot of time to clamp a workpiece, and the processing efficiency is not high.

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