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A piezoelectric membrane pump and its manufacturing method

A piezoelectric film and a manufacturing method, which are applied to pumps, parts of piezoelectric devices or electrostrictive devices, pumps with flexible working elements, etc. and other problems, to achieve the effect of simple and convenient production method, wide promotion and strong practicability

Inactive Publication Date: 2017-01-04
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For example, the fluid flow is discontinuous, the flow rate range is narrow, the manufacturing process is complicated, and it is difficult to integrate, etc.

Method used

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  • A piezoelectric membrane pump and its manufacturing method
  • A piezoelectric membrane pump and its manufacturing method
  • A piezoelectric membrane pump and its manufacturing method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] Piezoelectric film pump of the present invention and manufacturing method thereof comprise the following steps:

[0034] 1) Cut the polarized PVDF piezoelectric film without electrodes with a thickness of 28 microns into strips of 20×40 mm according to the polarization direction with a sharp blade, and fix it on the fixture along the polarization direction, Install the mask plate for making patterned electrodes, which is made by laser cutting a plexiglass plate with a thickness of 1 mm, and the piezoelectric film pump working area electrode on the mask plate is a circle with an aperture of 5 mm;

[0035]2) Use a DC sputtering apparatus to plate gold electrodes on the upper surface and the lower surface of the piezoelectric film respectively, set the sputtering current to 10 mA, and the time is 25 minutes, and deposit a layer thickness on the upper surface and the lower surface of the PVDF piezoelectric film A patterned gold electrode of about 100 nanometers, after the e...

Embodiment 2

[0040] The manufacturing method of the piezoelectric film pump used in the microfluidic system of the present invention comprises the following steps:

[0041] 1) Use a sharp blade to cut the polarized PVDF piezoelectric film without electrodes with a thickness of 28 microns into a rectangle of 50 × 110 mm according to the polarization direction, fix it on the fixture along the polarization direction, and install Make a mask plate for the patterned electrode, which is made by laser cutting a plexiglass plate with a thickness of 1 mm. The piezoelectric film pump working area electrode on the mask plate is a circle with an aperture of 5 mm;

[0042] 2) Use a DC sputtering apparatus to plate gold electrodes on the upper surface and the lower surface of the piezoelectric film respectively, set the sputtering current to 10 mA, and the time is 25 minutes, and deposit a layer thickness on the upper surface and the lower surface of the PVDF piezoelectric film A patterned gold electrod...

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Abstract

The invention discloses a piezoelectric thin film pump and a manufacturing method thereof. It comprises a cover plate, a piezoelectric film, a channel layer and a substrate from top to bottom, and the cover plate, the piezoelectric film, the channel layer and the substrate are fixedly connected. The upper surface and the lower surface of the membrane are correspondingly plated with a conductive film area, and the conductive film area includes the working area electrode of the piezoelectric film pump and the conduction area connected with the working area electrode of the piezoelectric film pump. A first through hole is opened on the cover plate, and the first through hole is facing the working area electrode of the corresponding piezoelectric film pump on the piezoelectric film. A fluid channel is opened on the channel layer, and one end of the fluid channel is connected to the outside world. The fluid channel It includes a second through hole, a liquid storage tank through hole, a liquid receiving tank through hole and a channel slot hole, the second through hole is facing the first through hole, and the second through hole is connected to the liquid receiving tank through hole and the liquid storage tank. The holes are all connected through channel slots. The production method is simple and convenient, no expensive equipment is needed in the whole production process, it can be widely popularized, and it has strong practicability.

Description

technical field [0001] The invention relates to a piezoelectric pump and a manufacturing method thereof, in particular to a piezoelectric film pump and a manufacturing method thereof. Background technique [0002] Microfluidic detection chips are widely used in biological detection, medical diagnosis, biochemical analysis and other fields because of their small size, easy integration, and time-saving characteristics. There is an indispensable component in the use of microfluidics, which is the microfluidic pump. The channel of the microfluidic chip is very small (micron level) and cannot be operated manually, so all the work of transporting liquid must be done by the pump. There are currently two types of pumps used in microfluidics research, one is a syringe pump and the other is a peristaltic pump. Both types of pumps are commercially available to meet a wide range of flow rates. But there is a problem that this kind of pump is bulky, and it is placed outside the body o...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04B43/04B23P15/00H01L41/04H10N30/80
Inventor 任巍赵蓓徐峰刘红伟崔兴业吴小清史鹏
Owner XI AN JIAOTONG UNIV