Coating method and device

Abstract

The invention relates to a coating method and a coating device. The coating device comprises a host bench. A firs track, a second track, a first conversion mechanism and a second conversion mechanism are arranged on the host bench, wherein the first track and the second track are used for positioning or conveying a carrier disk. A first gantry and a second gantry are arranged above the first track or the second track to form an operation region therebetween. The first gantry is provided with a first operating means. The second gantry is provided with a second operating means. The carrier disk is conveyed from the first conversion mechanism to the first track or the second track via the first operating means and the second operating means, so that the coating of the tacky material is conducted. After the coating process, the carrier disk is conveyed from the first track or the second track to the second conversion mechanism to be delivered to the outside.

Description

technical field [0001] The present invention relates to a coating method and device, especially a method for coating viscous materials on a substrate set on the tray for carrying chips. Methods and devices. Background technique [0002] Generally, when a wafer is cut into chips, each chip must be packaged in a substrate (SubstrateBoard) before the chip can be used; and the current operation of placing the chip on the substrate is usually through a substrate. Carrier plate (Boat) to complete, so that the carrier plate provides a number of neatly arranged placement areas for each substrate to be placed in each area of ​​the carrier plate, and then the predetermined position on the substrate is coated with adhesive material for chips When placed on the substrate, the sticky material can be used to fix the preset position of the substrate to carry out the next manufacturing process. [0003] A prior art method and device for coating viscous material at a predetermined position...

AI Technical Summary

Problems solved by technology

[0004] Another prior art method and device for coating a viscous material at a predetermined position on a substrate adopts two parallel first and second guide rails under the two gantry gates to transport the two trays respectively, and in order to improve the efficiency, The first guide track and the second guide track are set on the gantry to respectively set the detection unit and the first discharge head, and the third guide track is set on the second gantry to set the second discharge head so that the first The carrier plate on the guide rail is detected by the detection unit when it is conveyed under the first guide rail on the first gantry, and then continues to be conveyed through the bottom of the second guide rail on the first gantry, coated by the first discharge head, and then returns to the original position. The bottom of the first guide rail on the first gantry is detected by the detection unit to complete the coating operation; while the second guide rail has the same procedures and operations as the first guide rail, but one later than the operation procedure on the first guide rail step

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