Structure improved cold shield baffle of cryopump

Abstract

The invention discloses a structure improved cold shield baffle of a cryopump. The structure improved cold shield baffle of the cryopump comprises a cross-shaped fixed support and cone-shaped baffle rings, a plurality of inclined slots are formed in the fixed support, the baffle rings are inserted into the slots of the fixed support, vertical annular bodies are formed through extending on the lower side edges of the baffle rings, a plurality of notches are formed in the annular bodies, folded edges are formed in the side edges of the notches of the annular bodies, and the folded edges lean against the side walls of the baffle ring fixed support and are fixed on the fixed support through rivets in a riveted mode. According to the structure improved cold shield baffle of the cryopump, a riveting structure is adopted for the baffle rings on the fixed baffle to replace a welding method, so that the assembly and the fixation of the baffle are facilitated, the time of the assembly is reduced, and the production efficiency is improved.

Description

Technical field: [0001] The invention relates to the technical field of vacuum cryopumps, in particular to a cold barrier plate with improved structure on the cryopump. Background technique: [0002] A cryopump is a vacuum pump that condenses gas on a low-temperature surface, also known as a condensation pump. The cryopump is a vacuum pump with the lowest ultimate pressure and the largest pumping rate to obtain a clean vacuum. The cryopump is equipped with a cold shield, and an adsorption array and a baffle are fixed inside the cold shield. The baffle absorbs gas molecules with a high freezing point, and gas molecules with a low freezing point pass through the baffle to be adsorbed by the adsorption array. Existing baffle structures such as figure 1 As shown, it is composed of a font-shaped fixing bracket 1 and a tapered retaining ring 2. The retaining ring 2 is inserted on the fixing bracket 1. In order to prevent the retaining ring 2 from falling off from the fixing brac...

AI Technical Summary

Problems solved by technology

Existing baffle structures such as figure 1 As shown, it is composed of a font-shaped fixing bracket 1 and a tapered retaining ring 2. The retaining ring 2 is inserted on the fixing bracket 1. In order to prevent the retaining ring 2 from falling off from the fixing bracket 1, soldering is generally required at each insertion point. Fixed, so the amount of soldering tasks is relatively large, and the baffle assembly takes a long time

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