Structure improved cold shield baffle of cryopump

A technology of structural improvement and cryogenic pumps, which is applied to pumps, pump components, variable capacity pump components, etc., can solve problems such as falling off, heavy workload, and long time-consuming baffle assembly, so as to achieve firm fixation, improve production efficiency, Easy to assemble and fix the effect

Inactive Publication Date: 2015-05-20
HUZHOU SHENXIANG SILK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Existing baffle structures such as figure 1 As shown, it is composed of a font-shaped fixing bracket 1 and a tapered retaining ring 2. The retaining ring 2 is inserted on the fixing bracket 1. In order to prevent the retaining ring 2 from falling off from the fixing bracket 1, soldering is generally required at each insertion point. Fixed, so the amount of soldering tasks is relatively large, and the baffle assembly takes a long time

Method used

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  • Structure improved cold shield baffle of cryopump
  • Structure improved cold shield baffle of cryopump
  • Structure improved cold shield baffle of cryopump

Examples

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Effect test

Embodiment Construction

[0016] Example: see Figures 2 to 4 As shown, a cold barrier plate with improved structure on a cryopump includes a cross-shaped fixing bracket 1 and a tapered retaining ring 2. Several inclined slots 11 are formed on the fixing bracket 1, and the retaining ring 2 is inserted into the fixing bracket. In the slot 11 of 1, a vertical ring body 21 is extended and formed on the lower side of the retaining ring 2, and several notches 211 are respectively formed on the upper side of the ring body 21, and folds are formed on the sides of the notches 211 of the ring body 21. The edge 212 and the folded edge 212 lean against the side wall of the fixing bracket 1 of the retaining ring 2 and are riveted and fixed on the fixing bracket 1 by rivets.

[0017] The width of the notch 211 on the ring body 21 is greater than the thickness of each support side on the fixed bracket 1 , and the notch 211 is inserted and sleeved on the fixed bracket 1 .

[0018] Corresponding rivet holes a are for...

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Abstract

The invention discloses a structure improved cold shield baffle of a cryopump. The structure improved cold shield baffle of the cryopump comprises a cross-shaped fixed support and cone-shaped baffle rings, a plurality of inclined slots are formed in the fixed support, the baffle rings are inserted into the slots of the fixed support, vertical annular bodies are formed through extending on the lower side edges of the baffle rings, a plurality of notches are formed in the annular bodies, folded edges are formed in the side edges of the notches of the annular bodies, and the folded edges lean against the side walls of the baffle ring fixed support and are fixed on the fixed support through rivets in a riveted mode. According to the structure improved cold shield baffle of the cryopump, a riveting structure is adopted for the baffle rings on the fixed baffle to replace a welding method, so that the assembly and the fixation of the baffle are facilitated, the time of the assembly is reduced, and the production efficiency is improved.

Description

Technical field: [0001] The invention relates to the technical field of vacuum cryopumps, in particular to a cold barrier plate with improved structure on the cryopump. Background technique: [0002] A cryopump is a vacuum pump that condenses gas on a low-temperature surface, also known as a condensation pump. The cryopump is a vacuum pump with the lowest ultimate pressure and the largest pumping rate to obtain a clean vacuum. The cryopump is equipped with a cold shield, and an adsorption array and a baffle are fixed inside the cold shield. The baffle absorbs gas molecules with a high freezing point, and gas molecules with a low freezing point pass through the baffle to be adsorbed by the adsorption array. Existing baffle structures such as figure 1 As shown, it is composed of a font-shaped fixing bracket 1 and a tapered retaining ring 2. The retaining ring 2 is inserted on the fixing bracket 1. In order to prevent the retaining ring 2 from falling off from the fixing brac...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04B37/08F04B39/00
Inventor 方永强
Owner HUZHOU SHENXIANG SILK
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