A method for adjusting the magnetic field strength of a magnetron
A technology of magnetic field strength and adjustment method, applied in ion implantation plating, metal material coating process, coating and other directions, can solve the problems of uneven corrosion rate, poor film thickness uniformity, uneven electron e movement, etc. Achieve the effect of improving utilization and good uniformity
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[0023] In order for those skilled in the art to better understand the technical solution of the present invention, the method for adjusting the magnetic field strength of the magnetron provided by the present invention will be described in detail below in conjunction with the accompanying drawings.
[0024] Firstly, it should be explained that in this embodiment, the direction from the magnetron 10 to the target 20 is defined as "up", and the direction from the target 20 to the magnetron 10 is defined as "down".
[0025] figure 2 The method for adjusting the magnetic field strength of the magnetron provided by the embodiment of the present invention is a schematic diagram of adjusting the magnetic field strength of the magnetron 10 . Please see figure 2 , in the magnetron sputtering equipment, the magnetron 10 is arranged below the target 20 for generating a magnetic field on the upper surface of the target 20, and between the magnetron 10 and the target 20 is filled with d...
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