Tube Growth Furnace
A growth furnace, tube-type technology, applied in the field of tube-type growth furnaces, to achieve the effect of increasing the temperature gradient, increasing the adjustable range, and reducing the diameter of the upper furnace ring
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[0021] The present invention will be further described in detail below in conjunction with examples, but the embodiments of the present invention are not limited thereto.
[0022] Such as figure 2 As shown, a tubular growth furnace, which includes a furnace ring 1 in a high temperature zone, a furnace ring 2 in a low temperature zone, a temperature control thermocouple 3 in a high temperature zone, a temperature control thermocouple 4 in a low temperature zone, an insulation layer 5, an upper furnace cavity 6 and The lower furnace cavity 7, the furnace ring 1 in the high temperature zone is set in the upper furnace cavity 6, the furnace ring 2 in the low temperature zone is set in the furnace ring 2 in the low temperature zone, and the heat preservation layer 5 surrounds the upper furnace On the furnace cavity 6 and the lower furnace cavity 7 , the high temperature zone temperature control thermocouple 3 is connected to the high temperature zone furnace ring 1 , and the low t...
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