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Experimental setup for studying the structure and properties of multicomponent thin films

A film structure and experimental device technology, applied in the field of experiments, can solve the problems of multi-system thin film research errors, affecting the consistency of results, time-consuming and laborious, etc., and achieve the effects of good consistency, accurate reference, and convenient use.

Active Publication Date: 2017-10-31
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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Problems solved by technology

This method requires multiple depositions, which is not only complicated, time-consuming and labor-intensive, but also may affect the consistency of the results due to different deposition conditions, causing errors in the research of multi-component thin films.

Method used

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  • Experimental setup for studying the structure and properties of multicomponent thin films
  • Experimental setup for studying the structure and properties of multicomponent thin films

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Embodiment Construction

[0019] In order to make the purpose, technical solution and advantages of the experimental device for studying the structure and performance of the multi-component thin film clearer, the present invention will be further described in detail below in conjunction with specific drawings and specific examples.

[0020] It should be noted that, in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined with each other.

[0021] The invention provides an experimental device for studying the structure and performance of multivariate thin films, including a vacuum chamber, a sputtering source, a chassis and a sample tray, and the sputtering source, the chassis and the sample tray are all installed in the vacuum In the chamber, the sample tray is installed on the chassis, and the sample tray is set within the sputtering range of the sputtering source. The target head of the sputtering source in this embodiment can be rotat...

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Abstract

The invention provides an experimental device for studying the structure and performance of multivariate thin films, including a vacuum chamber, a sputtering source, a chassis and a sample tray, and the sputtering source, the chassis and the sample tray are all installed on the In the vacuum chamber, the sample tray is installed on the chassis, and the sample tray is set within the sputtering range of the sputtering source. The experimental device for studying the structure and performance of the multi-element thin film is easy to use, has the same deposition conditions and good consistency, can quickly identify the structure and performance changes of the multi-element thin film system, and provides accurate reference for the research of the multi-element thin film system.

Description

technical field [0001] The invention relates to the experimental field, in particular to an experimental device for studying the structure and performance of multi-element thin films. Background technique [0002] At present, there are many researches on the structure and performance of multi-component thin films. Generally, the purpose of changing the thin film composition is achieved by changing the deposition rate of different constituent elements. This method requires multiple depositions, which is not only complicated, time-consuming and labor-intensive, but also may affect the consistency of the results due to different deposition conditions, causing errors in the research of multi-component thin films. [0003] Therefore, it is very urgent to design an experimental device that can accurately and quickly study the structure of multi-component thin films. Contents of the invention [0004] In order to overcome the above-mentioned deficiencies, the object of the prese...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/34C23C14/54
Inventor 宋振纶聂霞冒守栋晏敏胜郑必长
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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