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Door body structure for vacuum coating production line

A vacuum coating and production line technology, applied in the field of closed doors, can solve the problems of high cost and waste of resources in the vacuum coating process, and achieve the effects of saving costs, improving the sealing effect, and meeting the requirements of vacuum degree

Inactive Publication Date: 2015-06-17
XIANGTAN HONGDA VACUUM TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the rapid development of technology in the vacuum coating field, the semiconductor industry and the electronics industry are frequently updated, and the production line will face the fate of rapid elimination if it cannot adapt to the development and change of technology. The vacuum coating chamber airtight door manufactured by matching different production processes It will also be eliminated, which will cause waste of resources and make the cost of vacuum coating process remain high
In the prior art, there is no universal interchangeable door between different chambers in the vacuum coating production line

Method used

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  • Door body structure for vacuum coating production line
  • Door body structure for vacuum coating production line
  • Door body structure for vacuum coating production line

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Embodiment Construction

[0022] The present invention will be further described in detail and completely in conjunction with the embodiments and the drawings.

[0023] Figure 1 to Figure 5 , Is a schematic diagram of a door structure for a vacuum coating production line provided by the present invention. The vacuum coating production line includes a substrate transfer line and a coating line. The coating line further includes at least 7 chambers. The 7 chambers are an inlet chamber, an inlet transition chamber, an inlet buffer chamber, a coating chamber, and an outlet buffer chamber. , The exit transition chamber and the exit chamber, the door structure is arranged in each functional chamber in the vacuum coating production line. Such as Figure 1 to Figure 5 As shown, the door structure for the vacuum coating production line includes a door 100 and a door frame 200. Both sides of the door 100 are movably connected to the door frame 200. The size of the door mechanism for each functional chamber and t...

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Abstract

The invention discloses a door body structure for a vacuum coating production line. The door body structure is used for doors of all chambers of the coating production line, the size of all door body mechanism is consistent, and the left side and the right side of each door body can be opened and closed freely; each chamber door and a corresponding door frame are detachably connected through multiple seal assemblies, and the seal assemblies comprise hinge devices and locking pieces. Compared with the prior art, according to the door body structure for the vacuum coating production line, the doors of all the chambers of the vacuum coating production line adopt the door body mechanisms with the consistent size, therefore, the door of each chamber can be regulated at any time according to the coating area technology, the target door layout can be replaced at any time according to the structural design of a double-face film layer to meet the coating requirements, the production line can be upgraded and improved at any time to comply with the development of the film layer to upgrade, and the production line cost is saved; the door body mechanisms are all movable and detachable, the chamber doors and the door frames are fixed through the detachable seal assemblies of a double-shaft structure, the seal effect of the coating chambers is improved, the requirement of the coating technology for the vacuum degree is met, and therefore the door body structure has wide application prospects.

Description

Technical field [0001] The invention relates to the field of closed doors, in particular to a door structure for a vacuum coating production line. Background technique [0002] In the field of vacuum coating, a general vacuum coating production line includes at least seven chambers. According to different needs, each chamber is generally matched with chamber sealing doors of different specifications and different opening and closing directions. Due to the rapid development of technology in the field of vacuum coating, the semiconductor industry and the electronics industry are updated frequently, and the production line cannot adapt to the development and change of technology will face the fate of rapid elimination. The vacuum coating chamber sealing door manufactured by matching different production processes will follow It will also be eliminated, which will inevitably cause a waste of resources and make the cost of the vacuum coating process high. In the prior art, there is n...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): E06B3/36E06B7/16E05D3/02
Inventor 黄国兴孙桂红祝海生黄乐梁红吴永光
Owner XIANGTAN HONGDA VACUUM TECH CO LTD
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