Twister spraying system for fine cleaning
A jetting system and cyclone technology, applied in jetting devices, liquid jetting devices, cleaning methods using liquids, etc., can solve problems such as cleaning with adverse effects, and achieve the effects of simple process, stable cleaning, and low power consumption
Active Publication Date: 2015-08-05
股份公司未来TEC
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Problems solved by technology
[0005] However, in such prior art, since the microbubbles generated by passing deionized water (DIW) through the microbubble generator are directly used for cleaning, there is a disadvantage that Particulates are counterproductive to cleaning
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[0037] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
[0038] figure 1 is a perspective view showing the structure of a cyclone injection system for performing fine purification according to the present invention, figure 2 is a diagram showing a detailed structure of a cyclone injection system for performing fine purification according to the present invention. figure 1 The structure shown shows the removal of figure 2 With the structure of the cyclone nozzle module 10 shown, the system according to the present invention can figure 1 The structure shown is combined with the cyclone nozzle 10 to inject cleaning steam and fluid to perform fine cleaning. Therefore, although the cyclone nozzle module 10 will be described below as a component of the system of the present invention, configurations other than the cyclone nozzle module 10 should be understood as substantial system configurat...
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The present invention relates to a twister spraying system. More particularly, the present invention relates to a twister spraying system for fine cleaning which may remove fine pollution particles such as fine impurities generated during a touch screen panel (TSP) manufacture and fine impurities generated during a photography process of a wafer by injecting a mixed fluid obtained by previously mixing a micro bubble and deIonized water (DIW) and clean dried air (CDA) to mix the mixed fluid and the CDA at high pressure in a twister scheme. The twister spraying system for injecting steam and fluid fine cleaning to a twister nozzle module includes a first injection line to inject a CDA to the twister nozzle module; a second injection line to inject a mixed fluid obtained by mixing a micro bubble and deIonized water (DIW) and clean dried air (CDA) to the twister nozzle module; a third injection line to inject steam to the twister nozzle module; a mixer to generate the mixed fluid; and a buffer tank to store the mixture fluid generated from the mixer for supplying the mixed fluid through the second injection line.
Description
technical field [0001] The present invention relates to a cyclone spraying system (twister spraying system) for supplying steam and fluid for fine purification to a twister nozzle (twister nozzle) at a certain pressure and flow rate. More specifically, it relates to a method for The cyclone injection system for fine purification, that is, capable of 24-hour steam generation and injection, and injection of mixed fluid pre-mixed with microbubbles and deionized water (DeIonized Water, DIW) and clean dry air (Clean Dried Air, CDA), These are mixed in a cyclone under high pressure and then sprayed, whereby fine contamination particles such as fine impurities are removed. Background technique [0002] In recent years, cleaning or washing techniques utilizing microbubbles have been disclosed. [0003] Cleaning or washing technology using microbubbles is applied to the cleaning of semiconductor components, the cleaning of impurities (particles, oil stains, and stains, etc.) generat...
Claims
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IPC IPC(8): B08B3/02B08B5/02
CPCB05B7/0416B05B7/12B05B3/02B05B7/0408B05B7/10B05B12/02H01L21/67051
Inventor 金铉泰
Owner 股份公司未来TEC