Large-stroke three-dimensional nano flexible moving platform

A three-dimensional nanometer and motion platform technology, which is applied to the parts of the instrument, the instrument, the shell, etc., can solve the problems of large plane size and small stroke, and achieve the effect of small plane size, large motion stroke and high motion precision

Active Publication Date: 2015-09-23
TSINGHUA UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, the existing flexible micro-positioning platform has the disadvantages of small stroke and large plane size.

Method used

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  • Large-stroke three-dimensional nano flexible moving platform
  • Large-stroke three-dimensional nano flexible moving platform
  • Large-stroke three-dimensional nano flexible moving platform

Examples

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Embodiment Construction

[0024] Embodiments of the invention are described in detail below, examples of which are illustrated in the accompanying drawings. The embodiments described below by referring to the figures are exemplary and are intended to explain the present invention and should not be construed as limiting the present invention.

[0025] The following describes the large-stroke three-dimensional nano-flexible motion platform 10 according to an embodiment of the present invention with reference to the accompanying drawings. Such as Figure 1-Figure 8 As shown, the large-stroke three-dimensional nano-flexible motion platform 10 according to the embodiment of the present invention includes a base 101, a terminal platform 102, an X-direction driver (not shown in the figure), a Y-direction driver (not shown in the figure), a first The Z-direction flexible decoupling piece 1041 , the second Z-direction flexible decoupling piece 1042 , the first amplifying rod 1051 and the second amplifying rod ...

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Abstract

The invention discloses a large-stroke three-dimensional nano flexible moving platform. The platform comprises a substrate; a terminal platform; an X-direction driver and a Y-direction driver; a first Z-direction flexible decoupling device and a second Z-direction flexible decoupling device, wherein one end of the first Z-direction flexible decoupling device and one end of the second Z-direction flexible decoupling device are connected with the terminal platform; a first amplifying rod and a second amplifying rod, wherein the lower end of the first amplifying rod is connected with the substrate through a first lower flexible hinge, and the upper end of the first amplifying rod is connected with the first Z-direction flexible decoupling device through a first upper flexible hinge. The lower end of the second amplifying rod is connected with the substrate through a second lower flexible hinge, and the upper end of the second amplifying rod is connected with the second Z-direction flexible decoupling device through a second upper flexible hinge. The X-direction driver is connected with the first amplifying rod, and the Y-direction driver is connected with the second amplifying rod. The platform provided by the invention is small in plane side, is high in moving precision, and has advantages of centimeter-level large stroke and nano precision.

Description

technical field [0001] The invention relates to a large-stroke three-dimensional nano-flexible motion platform. Background technique [0002] Existing flexible micro-positioning platforms are planar flexible micro-positioning platforms. Specifically, the existing flexible micro-positioning platforms are all made of metal materials through wire cutting. Therefore, the existing flexible micro-positioning platforms have the disadvantages of small travel and large plane size. Contents of the invention [0003] The present invention aims to solve one of the technical problems in the related art at least to a certain extent. Therefore, the present invention proposes a large-stroke three-dimensional nano-flexible motion platform with the advantages of small plane size, high motion precision, and large motion stroke. [0004] The large-stroke three-dimensional nano-flexible motion platform according to the embodiment of the present invention includes: a base; a terminal platfor...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G12B9/10G12B5/00
Inventor 张震汤佳骏王鹏闫鹏
Owner TSINGHUA UNIV
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