A Distance Measuring and Vibration Measuring Structure Based on Laser Interferometry

Abstract

The invention discloses a distance and vibration measuring structure based on laser interference. An output end of a laser is connected with an input end of a beam splitter, one output end of the beam splitter is connected with one input end of a beam combiner, the other output end of the beam splitter is connected with an optical signal input end of a first AOM (acoustic optical modulator), an electrical signal input end of the first AOM is connected with an output end of a first driver, and an input end of the first driver is connected with an output end of a first trigger; an output end of the first AOM is connected with an optical signal input end of a second AOM, an electrical signal input end of the second AOM is connected with an output end of a second driver, and an input end of the second driver is connected with an output end of a second trigger; a laser output by the second AOM is projected onto a to-be-measured target, the to-be-measured target reflects the laser to the other input end of the beam combiner, an output end of the beam combiner is connected with an input end of a detector, and an output end of the detector is connected with an input end of a processor. During distance measuring, long distance and high accuracy are realized, an optical structure in a distance measuring structure can be used for vibration detection, and the working efficiency of a system is improved.

Description

technical field [0001] The invention relates to a distance measuring and vibration measuring structure using laser interference technology, in particular to a laser homodyne interference distance measuring and laser heterodyne interference vibration measuring structure. Background technique [0002] At present, laser interference vibration measurement is a relatively mature technology. For example, German Polytec Company and American Photodynamic Company have developed laser Doppler vibration measurement instruments. The measurement accuracy can reach nm level, and the acceleration can reach more than 1g. Laser ranging is widely used, such as bosch long-distance ranging instruments. However, whether it is a long-distance rangefinder or a laser Doppler vibration measuring instrument, both of them use optical structures and laser light sources. It can measure the distance of the object and the vibration data such as the displacement, velocity and acceleration of the object. I...

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to solve the problem that the current laser distance measurement cannot achieve long distance and high precision at the same time, the laser distance measurement and vibration measurement equipment are independent of each other, and the distance of the object and the vibration of the object cannot be measured on one equipment, and the operation is cumbersome. technical problem

Images