A Distributed Up and Down Double Workpiece Table Device
A dual workpiece table, distributed technology, applied in the field of workpiece table devices, can solve the problem that cannot be regarded as double workpiece table, etc., and achieve the effect of increasing exposure efficiency
Active Publication Date: 2017-05-24
中夏芯基(上海)科技有限公司
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Problems solved by technology
Although there is a certain improvement in efficiency, it cannot be regarded as a real double workpiece table
Method used
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[0027] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.
[0028] The embodiment of the present invention provides an up and down distributed double workpiece table device, such as figure 1 , figure 2 As shown, it includes a base 1, a boss 2 is arranged on the base, a first horizontal guide rail 3 and a support frame 4 are arranged on the boss 2, a second horizontal guide rail 5 is arranged on the support frame 4, and a second horizontal guide rail 5 is arranged on the second horizontal guide rail. 5 parallel and located...
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An up-and-down distributed double-workpiece-stage device comprises a base provided with a boss, the boss is provided with a first horizontal guide rail and a support frame which is provided with a second horizontal guide rail, and the second horizontal guide rail is parallel to and located at the upper end of the first horizontal guide rail; the two horizontal guide rails are connected with a first horizontal sliding seat and a second horizontal sliding seat respectively, and the first horizontal sliding seat and the second horizontal sliding seat have the same horizontal sliding stroke along the two horizontal guide rails respectively; the first horizontal sliding seat and the second horizontal sliding seat are fixedly connected with a first L-shaped support and a second L-shaped support respectively, the two L-shaped supports are each provided with a vertical sliding seat, and the vertical sliding seats are each provided with a workbench through support tables. According to the up-and-down distributed double-workpiece-stage device, the two workbenches switch the positions with each other through the horizontal guide rails and vertical guide rails, different processes are completed at different positions, switching of the processes is completed by switching the positions, exposure and assembly and disassembly of a PCB can be conducted simultaneously, and the exposure efficiency is increased.
Description
technical field [0001] The invention relates to a workpiece platform device, in particular to a device with two workpiece platforms working independently of each other. Background technique [0002] The positioning platform is a must-configured component of the PCB direct imaging equipment. It is used to absorb and fix the PCB board, initially locate the position of the PCB board, and ensure that the PCB can reach the correct position and the correct route with the movement of the workpiece table during the LDI lithography process. and speed movement. Since the surface of the PCB board needs to be coated with a photosensitive film, the positioning and fixing method of the PCB board is mostly the adsorption type. In modern industrial production, the pursuit of efficiency is endless. The double worktable device can effectively improve the efficiency of the LDI exposure machine. The upper workbench completes the work of receiving and placing the board, as well as alignment, a...
Claims
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IPC IPC(8): G03F7/20
Inventor 项宗齐
Owner 中夏芯基(上海)科技有限公司