Material filling device and material filling method

Abstract

The invention relates to the field of chemical machines, and discloses a material filling device and a material filling method. The material filling device comprises a material source (1), containers (3) to be filled, a material conveying pipeline system and a gas pipeline system. The material source (1) and the containers (3) are connected through the material conveying pipeline system. The gas pipeline system and the material conveying pipeline system both can be communicated with the containers (3). The gas pipeline system is used for exhausting air and steam in the material conveying pipeline system and the gas pipeline system. By means of the material filling device, safe filling can be carried out on materials without glove boxes or other additional devices.

Description

technical field [0001] The invention relates to the field of chemical machinery, in particular to a material filling device and a material filling method. Background technique [0002] MO sources are high-purity metal-organic compounds, which are support materials for epitaxial growth using metal-organic chemical vapor deposition (MOCVD), such as GaAs, GaN, InP, AlGaAs and other compound semiconductor ultra-thin film materials, which can be used to produce LED epitaxy Chips, HEMT devices, semiconductor lasers, solar cells, etc.; it is one of the key materials for the development of the optoelectronics industry, and is also an essential raw material for the production of high-brightness, ultra-high-brightness luminescent materials and large-scale integrated circuits. The MO source has very active chemical properties and is extremely sensitive to air and water vapor. It will spontaneously ignite instantly in the air, and explode violently when it meets water. Therefore, the f...

AI Technical Summary

Problems solved by technology

During the filling process, due to the extremely volatile characteristics of some types of MO sources, it is easy to fill the glove box with gaseous MO sources, which causes a large amount of adsorbates (such as organic solvent adsorption columns) in the glove box to be consumed , requiring frequent replacement

[0004] With the rapid development of the market economy and the increasing application of electronic technology, the market demand for MO sources has increased significantly, and the specifications of steel cylinders used for filling MO sources have also been continuously enlarged, from the initial 500g, 1000g to 8kg, 16kg or even larger, because the steel cylinder after filling is heavy, the steel cylinder is easy to slip and damage the glove box during the process of manually moving the steel cylinder, which may cause the MO source to burn, which makes the pure manual operation in the glove box change. It is more difficult and there is a greater potential safety hazard

[0005] It can be concluded that the traditional manual filling method has been difficult to meet the demand

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