Film forming device

Abstract

Provided is a film forming device which can secure work space without vertical overlap of the film forming unit and the units upstream and downstream thereof. This film forming device is provided with a film forming unit (16), and an upstream and downstream unit (14, 18) arranged to the left and right thereof. The film forming unit (16) is provided with: a film forming roller (70); multiple guide rollers (72); a main chamber (64) having a film forming roller housing unit (74) and, thereabove, a guide roller housing unit (76); a first and second process chamber (66, 68) which house multiple film forming process devices (84, 86) to the left and right of the film forming roller housing unit (74); and process chamber support units (104) for supporting the first and second process chamber (66, 68) so as to allow the first and second process chamber (66, 68) to move between a regular position for film formation and a retracted position retracted to the left or right, and between the retracted position and an exposure position separated in the front / back direction.

Description

technical field [0001] The present invention relates to a continuous film forming apparatus for forming a thin film such as a functional thin film on the surface of a strip-shaped film-forming material. Background technique [0002] Conventionally, as an apparatus for continuously film-forming a thin-walled film-forming material made of a long film or sheet, a structure is known in which the film-forming material is continuously conveyed in a vacuum chamber. , and various functional films are formed on its surface by sputtering or evaporation. [0003] As such a film forming apparatus, for example, Patent Document 1 discloses a structure including an upper chamber and a lower chamber. The lower chamber accommodates a film-forming roll capable of winding a film-forming material made of a film or the like, a plurality of sputtering sources for performing film-forming processing on the film-forming material, and the like. The lower chamber has left and right side walls on whi...

AI Technical Summary

Problems solved by technology

This complicates the assembly work of the entire device and makes maintenance difficult.

Specifically, when assembling the above-mentioned device, it is necessary to use a crane or the like to lift the heavy upper chamber and install the lower chamber below it in the state of lifting the heavy upper chamber, and to connect the above-mentioned upper chamber on the large-scale work. homework is not easy

In addition, when replacing and maintaining various parts in the upper chamber, the operator must enter the upper chamber from the upper side of the upper chamber at a higher position to perform operations. Sexual equipment costs also increase

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