Provided are, inter alia, a distribution measurement
system with which it is possible, when measuring pressure or the like at measurement points that are distributed two-dimensionally, to reduce the thickness of the entire distribution measurement
system and to precisely measure pressure or the like in a low range, without employing a complicated circuit configuration. In a measurement element (10) of a three-axis sensor, a stress-sensitive layer (4) is formed so as to
straddle a lower
electrode (6) on one end side (6r) of the lower
electrode (6). An upper
electrode (2) is formed on the stress-sensitive layer (4), and the electrodes and the stress-sensitive layer (4) are stacked in
close contact with each other. The lower electrode (6) and the upper electrode (2) have regions that overlap in the vertical direction on a plane at the one end side (6r) of the lower electrode (6). The three-axis sensor M is manufactured through a
lithography technique. In the three-axis sensor, measurement elements for measuring
shear stress in the direction of one axis of the plane and contact stress in the direction of an axis perpendicular to the plane are arranged in the form of a matrix on the plane. The
contact pressure (Pc) and / or the
shear stress (S) are detected on the basis of a change in electrical resistance of a pair of measurement elements adjacent to each other in the direction of the one axis.