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89 results about "Gate source capacitance" patented technology

There is always capacitance between drain and gate which can be a real problem. A common MOSFET is the FQP30N06L (60V LOGIC N-Channel MOSFET). The Miller capacitance is the reverse transfer capacitance listed above and the input capacitance is the gate-source capacitance. Output capacitance is from drain to source.

Source-drain buried graphene transistor device on diamond-like carbon substrate and manufacture method

A source-drain buried graphene transistor device on a diamond-like carbon substrate and a manufacture method are applicable to radio frequency communication. The manufacture method includes: firstly, depositing a layer of diamond-like carbon amorphous carbon smooth in surface and stable in chemical property on the substrate by the aid of a magnetic filtered cathode vacuum arc system; secondly, etching a source trench and a drain trench on the diamond-like carbon amorphous carbon insulating layer and filling electrode metal into the trenches; thirdly, planarizing and cleaning the surface of the substrate prior to transferring graphene grown by a chemical vapor deposition method to the cleaned substrate; fourthly, growing gate insulating dielectric by an atomic layer deposition method and sputtering gate electrode metal; and finally, forming a metal gate by means of reactive ion etching and depositing low-K insulating dielectric to protect the device. Carrier mobility of a graphene transistor is high, and the source-drain buried structure is capable of decreasing the graphene length of a region uncovered by the gate, so that gate-source capacitance, gate-drain capacitance and channel resistance are reduced, and high-frequency performance and efficiency of the graphene transistor are improved. The source-drain buried graphene transistor device can be widely applied to small-sized high-frequency graphene integrated circuits.
Owner:INST OF MICROELECTRONICS CHINESE ACAD OF SCI

Low-color-error liquid crystal array substrate and drive method thereof

The invention relates to a low-color-error liquid crystal array substrate and a corresponding drive method. The low-color-error liquid crystal array substrate comprises a plurality of pixel structures, each pixel structure comprises a primary pixel area and a secondary pixel area, a gate line is arranged between each primary pixel area and the corresponding secondary pixel area and is provided with a first thin film transistor and a second thin film transistor which are connected to the primary pixel area and the secondary pixel area respectively, the position between each gate line and the corresponding secondary pixel area further comprises a public electrode wire and a metal component, each public electrode wire is provided with a standoff capacitor, and each metal component is provided with a share thin film transistor connected with the corresponding standoff capacitor and electrically connected with a data line through a through hole. Through the design of omitting a sub gate line, switches of the share thin film transistors are switched on directly through signal voltage of the data lines; the inconformity of voltage between each primary pixel area and the corresponding secondary pixel area is solved by adjusting the gate source capacitance of the thin film transistor in the primary pixel area, the aperture opening ratio is improved, and the processing cost is lowered.
Owner:SHENZHEN CHINA STAR OPTOELECTRONICS TECH CO LTD

Array substrate and manufacturing method thereof and display device

The invention relates to an array substrate and a manufacturing method thereof and a display device. The array substrate comprises a substrate, common electrodes, multiple rows of grid lines and multiple pixel electrodes, wherein the common electrodes, the multiple rows of grid lines and the multiple pixel electrodes are formed on the substrate; the pixel electrodes and the common electrodes are arranged at different layers; a vertical overlap part exists in each pixel electrode and the corresponding common electrode; and in two pixel electrodes connected to the same row of grid lines, the area of the vertical overlap part of the pixel electrode which is further to the first ends of the grid lines and the corresponding common electrode is smaller than that of the pixel electrode which is nearer the first ends of the grid lines and the corresponding common electrode. According to the array substrate, the leaping voltage of the pixel electrode further to the first ends of the grid lines obtains more compensation than that nearer the first ends of the grid lines, so that the difference between the leaping voltages of two pixel electrodes is reduced; the residual image is reduced. Furthermore, compared with the mode of increasing a gate-source capacitance in the prior art, the array substrate has the advantage that the power consumption of the array substrate can be reduced.
Owner:BOE TECH GRP CO LTD

Silicon carbide Trench MOS device and manufacturing method thereof

The invention discloses a silicon carbide Trench MOS device and a manufacturing method thereof, and belongs to the technical field of power semiconductors. The method includes: a layer of a polysilicon region distributed in a pi shape is additionally arranged under a trench gate structure of a conventional device, the polysilicon region and an epitaxial layer form a Si/SiC heterojunction, and a diode is integrated in the device. Compared with a parasitic silicon carbide diode which directly employs a silicon carbide Trench MOS, according to the silicon carbide Trench MOS device and the manufacturing method thereof, the junction voltage drop of the device diode during application is substantially reduced, and the switch-on characteristic of the device is improved through large junction area of the heterojunction; moreover, the gate-drain capacitance and the ratio of the gate-drain capacitance to the gate-source capacitance of the device are reduced, and the performance and the reliability of the device MOS during application are enhanced; besides, the silicon carbide Trench MOS device and the manufacturing method thereof are also advantageous in that the reverse recovery time is short, the reverse recovery charges are less, and advantages including low reverse leakage, high breakdown voltage, and good temperature stabilization performance of the conventional silicon carbide Trench MOS device are maintained. In conclusion, according to the silicon carbide Trench MOS device and the manufacturing method thereof, the prospect is wide in circuits such as inversion circuits and chopper circuits etc.
Owner:HANGZHOU SILICON-MAGIC SEMICON TECH CO LTD

Shield gate trench power device and manufacturing method thereof

The invention discloses a shield gate trench power device. A gate structure of a device unit region comprises a shielding dielectric layer formed on the inner side surface of a gate trench; the shielding dielectric layer is formed by superposing a thermal oxidation layer and a CVD dielectric layer; active polycrystalline silicon is filled in a gap region formed by filling the shielding dielectriclayer; top trenches formed by etching part of the shielding dielectric layer close to the side surface of the gate trench are formed in two sides of the source polysilicon, and the top trenches are completely located in the thermal oxide layer; the shielding dielectric layer between the second side surface of the top trench and the source polysilicon is used as an inter-polysilicon dielectric layer; the top trench is filled with a polysilicon gate, and a gate dielectric layer is formed on the first side surface of the top trench. The invention further discloses a manufacturing method of the shield gate trench power device. According to the invention, the thickness uniformity of the side wall and the bottom shielding dielectric layer of the trench can be improved, so the voltage resistanceof the device can be ensured, the on resistance of the device can be reduced, and the gate-source capacitance of the device can be reduced.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

LDMOS (Lateral Diffusion MOS) structure

ActiveCN107785423AWill not increase the quantityIncrease the area of ​​the depleted regionSemiconductor devicesLDMOSGate source capacitance
The invention provides a LDMOS (Lateral Diffusion MOS) structure. The LDMOS structure comprises a semiconductor substrate, a first drift area and a second drift area which are located in the semiconductor substrate and are arranged separately, a source which is located in the first drift area, a drain which is located in the second drift area, a gate structure which is located on the semiconductorsubstrate and whose two sides are contacted with the first drift area and the second drift area respectively, a first isolation structure which is located in the first drift area and isolates the source and the gate structure, and a second isolation structure which is located in the second drift area and isolates the drain and the gate structure, wherein both the first isolation structure and thesecond isolation structure are provided with floating field plates. One or more floating field plates is arranged on the isolation structures between the source-gate and the drain-gate, the area of adepleted area can be increased, collision ionization can be reduced, higher breakdown voltage and saturation leakage current Idsat can thus be acquired, and the gate-drain capacitance Cgd and the gate-source capacitance Cgs of the device are not deteriorated.
Owner:SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORP +1

Trench insulated gate bipolar transistor device and generating method thereof

The invention provides a trench insulated gate bipolar transistor device and a generating method thereof. A relatively thick gate oxide film is formed at the bottom of a trench region through a plasmafilm forming process. Due to the fact that the thickness of the gate oxide film at the bottom of a trench is increased, the consistency of the gate oxide thickness is guaranteed, the defect that a gate oxide layer at the bottom of the trench is easy to break down is eliminated, and the robustness of a gate oxide breakdown voltage is improved. Meanwhile, the area of a gate-drain capacitor is reduced, so that the Miller capacitance is reduced, the switch delay time is shortened, the switch dynamic loss of a device is reduced, and the switch characteristic of the device is improved. Meanwhile, the relatively thick gate oxide film is formed at the bottom of the trench, so that the upper surface of polycrystalline silicon subjected to back etching can be leveled and is slightly higher than thesurface of a silicon wafer of a N-type base region; and higher N+ emitter junction depth can be formed without increasing the injection energy of an N+ emitter and carrying out longer-time high-temperature trap pushing, so that the vertical overlapping area of the gate and the source is reduced, the gate-source capacitance is reduced, and the switch loss of an IGBT is reduced.
Owner:上海擎茂微电子科技有限公司

Split gate power MOS device

The invention belongs to the technical field of power semiconductors and relates to a split gate power MOS device. Compared with a traditional split gate power MOS, high K medium is introduced as a gate medium layer of a shielding gate and a control gate above the shielding gate is divided into two. When the device is in forward direction blocking, the enhancement of the high K medium assists depletion of a drift region, the concentration of the drift region is improved and the reduction of specific on-resistance is facilitated. When the device is in forward direction conduction, the drift region adjacent to the high K medium produces an electron accumulation layer, the high K medium enhances the accumulation effect and the specific on-resistance is reduced further. When the device is in a switching process, the control gate and the shielding gate are in strong coupling through the high K medium, so that the gate drain capacitance is reduced substantially. At the same time, due to the separately arranged control gate, the overlapping area is reduced, so that the gate source capacitance and the total gate charge are reduced. Compared with the traditional split gate power MOS, the split gate power MOS device has lower specific on-resistance and gate drain charge; the QGC*RDS (on) figure of merit is improved distinctively and drive loss and switch loss are reduced.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

Shield grid MOSFET and manufacturing method thereof

The invention discloses a shield grid MOSFET and a manufacturing method thereof. The shield grid MOSFET comprises a drift region of a first conduction type, a trench located in the top of the drift region and body regions of a second conduction type located on the two sides of the trench; a grid electrode and a shield grid are arranged in the trench, the grid electrode is located above the shield grid, and a first doped region of a first conduction type is arranged on one side, close to the grid electrode, of the top of the body region; a source electrode is arranged on the top surface of the first doped region, and the body region is connected with the source electrode; the shield grid is connected with the source grid; and a first oxide layer is arranged between the grid electrode and the first doped region, a grid oxide layer is arranged between the grid electrode and the body region, a second oxide layer is arranged between the shield grid and the inner wall of the trench, a third oxide layer is arranged between the grid electrode and the shield grid, and the thickness of the first oxide layer is greater than that of the grid oxide layer. According to the shield grid MOSFET, the grid drain capacitance is reduced, the grid source capacitance is reduced, and the response speed of the shield gate MOSFET is improved.
Owner:VANGUARD SEMICON CORP

Manufacturing method of separation gate power MOSFET device

The invention provides a manufacturing method of a separation gate power MOSFET device, which comprises the following steps of: after a dielectric layer between a control gate and a separation gate is formed, depositing or thermally growing a sacrificial oxide layer, depositing silicon nitride to fill the whole groove structure, and separating the silicon nitride from a silicon layer in an MESA region through the sacrificial oxide layer; after etching the silicon nitride, taking the silicon nitride reserved in the groove as a shielding layer for etching the oxide layer; etching the oxide layer until the interface of the oxide layer is higher than the upper interface of the stepped separation gate, and then etching the residual silicon nitride; and depositing polycrystalline silicon and performing back etching to form a control gate electrode. According to the device structure prepared by the invention, the lower half part of the control gate is relatively narrow, so that the gate-source capacitance Cgs can be greatly reduced, and meanwhile, the upper half part of the control gate increases the cross sectional area of gate current flowing, so that the gate resistance is reduced and the targets of high switching speed and low switching loss are achieved on the premise of ensuring that the gate-source capacitance Cgs and gate charge Qg are not degraded.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA
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