The application provides a shielded gate
trench MOSFET and a manufacturing method thereof, which comprises a drain layer, a first epitaxial layer, a second epitaxial layer, a first trench, a second trench, a first
dielectric layer, a source conductive layer, a gate trench, a
gate dielectric layer, a gate conductive layer, a
body region, a source region, a source line layer and a gate line layer. The application connects the source conductive layer, the source region and the
body region to the source line layer through a via, connects the gate conductive layer of part of the trench to the gate line layer through a hole, and connects the gate conductive layer of adjacent trenches to the source line layer through a via, so as to reduce the
zero temperature coefficient
cross point of the device, improve the
working capacity of the device in the linear working area, significantly reduce the
gate capacitance and the gate-source
capacitance of the device, improve the
switching frequency of the device, and enable the device to be applied to application occasions requiring higher
switching frequency. In addition, the manufacturing method of the application is compatible with the manufacturing process of common structures, and does not increase additional cost.