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Vacuum pump and method of manufacturing vacuum pump

一种制造方法、真空泵的技术，应用在用于弹性流体的泵送装置的部件、泵、泵元件等方向，能够解决定子温度下降、定子逸散、空隙变小等问题，达到避免接触的效果

Active Publication Date: 2016-01-27
SHIMADZU SEISAKUSHO CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] However, if the stator is heated by installing a heater as described above, there will be the following problems: the gap will become smaller due to thermal expansion, the entire circumference of the shaft will contact the hole, and the heat of the stator, which is a high-temperature part, will dissipate to the The base of the low temperature part, thus the temperature of the stator drops

Method used

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  • Vacuum pump and method of manufacturing vacuum pump
  • Vacuum pump and method of manufacturing vacuum pump
  • Vacuum pump and method of manufacturing vacuum pump

Examples

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Effect test

Deformed example 1

[0077] Figure 5 is a diagram showing Modification 1, and is the same as Figure 4 The case of is similarly an enlarged view of a part of the stator 22 . Figure 5 A case where positioning is performed between the inner peripheral surface of the base 20 and the outer peripheral surface of the flange portion 220 of the stator 22 is shown. In this case, the shape of the positioning member 40 may be cylindrical, or two members obtained by dividing a cylindrical member into four in the circumferential direction may be used. Hereinafter, the positioning member 40 will be described as a cylindrical shape. The outer peripheral surface 401 of the positioning member 40 and the inner peripheral surface 201 of the base 20 are in a fitting relationship (movable fitting). First, the positioning member 40 is placed on the base 20 .

[0078]Then, the stator 22 is disposed on the inner peripheral side of the positioning member 40 . The outer peripheral surface 220a of the flange portion 2...

Deformed example 2

[0080] Figure 6 It is a figure which shows the modification 2. In Modification 2, positioning is performed on the outer peripheral surface of the annular portion 202 provided on the base 20 and the outer peripheral surface of the flange portion 220 of the stator 22 . At this time, positioning is performed using a cylindrical positioning member 41 . In addition, the positioning member 41 is not limited to the cylindrical shape, and for example, a member that divides the cylindrical member into four in the circumferential direction may be used, and they may be connected by a horizontal plate. formed components. The outer diameter of the annular portion 202 and the outer diameter of the flange portion 220 are set to be the same, and the outer peripheral surfaces of the annular portion 202 and the flange portion 220 and the inner peripheral surface 400 of the positioning member 41 are in a fitting relationship (movably fitted). combine). After the stator 22 is positioned by t...

Deformed example 3

[0083] Figure 7 It is a figure which shows the modification 3. In Modification 3, the inner peripheral surface 201 of the base 20 and the inner peripheral surface 22c of the stator 22 are positioned. First, the stator 22 is disposed on the base 20 . Then, the annular positioning member 42 is arranged on the stator 22 . The outer peripheral surface 420 of the positioning member 42 is in a fitting relationship (movable fitting) with the inner peripheral surface 201 of the base 20 . On the other hand, the inner peripheral surface 421 of the annular convex portion 42c provided on the positioning member 42 is in a fitting relationship (movable fitting) with the inner peripheral surface 22c of the stator 22 . Therefore, the stator 22 is positioned with respect to the base 20 by fitting the outer peripheral surface 420 and the inner peripheral surface 201 , and the outer peripheral surface 421 and the inner peripheral surface 22 c.

[0084] The stator 22 is fixed to the base 20 ...

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Abstract

The invention relates to a vacuum pump and a method of manufacturing a vacuum pump. The vacuum pump makes it possible to reliably prevent contact between the stator having high temperature and the base having low temperature. The vacuum pump comprises a cylindrical rotor; a cylindrical stator (22) which discharges gas in cooperation with the rotor; and a tubular base (20) to which the stator (22) is fixed. The stator (22) has no fitting structure with respect to the base (20) and is fixed to the base (20) in a concentric state. In this case, there is no fitting structure on the radial gap (G1). Thus, the radial gap G1 can be set to be sufficiently large in consideration of thermal expansion of the stator (22). As a result, it is possible to reliably prevent contact between the stator (22) and the base (20) caused by thermal expansion.

Description

technical field [0001] The invention relates to a vacuum pump (pump) and a manufacturing method of the vacuum pump. Background technique [0002] Conventionally, a vacuum pump such as a turbo-molecular pump (turbo-molecular pump) has been used when evacuating a chamber (chamber) of a semiconductor manufacturing apparatus, a liquid crystal manufacturing apparatus, or the like. In the etching process (etching process) of a semiconductor manufacturing device or a liquid crystal manufacturing device, there is a problem that a reaction product accumulates in a vacuum pump. Therefore, it is known to raise the temperature of the pump by heating means to suppress accumulation of reaction products. For example, in the vacuum pump described in Patent Document 1, since reaction products tend to accumulate in the exhaust section including the cylindrical rotor (rotor) and stator (stator) (screw stator), a heater (heater) is embedded in the stator. The temperature is raised by direct h...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04D19/04
CPCF04D19/044F04D29/522F04D29/5853F04D29/644Y10T29/49243
Inventor 坪川彻也
Owner SHIMADZU SEISAKUSHO CO LTD
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