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Chemical sensors with consistent sensor surface areas

A chemical sensor and chemical technology, applied in the direction of chemical instruments and methods, instruments, scientific instruments, etc., can solve complex problems such as downstream signal processing

Active Publication Date: 2016-01-27
LIFE TECH CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Additionally, variations in chemical sensor performance across the array produce undesired differences in sensor output signals, which further complicate downstream signal processing

Method used

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  • Chemical sensors with consistent sensor surface areas
  • Chemical sensors with consistent sensor surface areas
  • Chemical sensors with consistent sensor surface areas

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Embodiment Construction

[0019] The described chemical detection devices include low-noise chemical sensors, such as chemically sensitive field-effect transistors (chemFETs), for detecting chemical reactions in superimposed operable correlated chemical reactions.

[0020] Reducing the plan view or top view area (or footprint) of individual chemical sensors and stacked reaction regions allows for higher density devices. However, as the size of chemical sensors decreases, applicants have found that a corresponding decrease in the sensor's sensing surface area can significantly impact performance.

[0021] For example, for a chemical sensor having a sensing surface defined at the bottom of the reaction region, reducing the plan view dimension (eg, width or diameter) of the reaction region results in a similar reduction in sensing surface area. Applicants have found that as the sensing surface area is reduced to technical limits, there is an increasing proportion of the overall change in sensing surface p...

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Abstract

In one embodiment, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A material defines an opening extending to the upper surface of the floating gate conductor. The material comprises a first dielectric underlying a second dielectric. A conductive element contacts the upper surface of the floating gate conductor and extends a distance along a sidewall of the opening, the distance defined by a thickness of the first dielectric.

Description

[0001] Cross References to Related Applications [0002] This application claims priority to US Provisional Application Nos. 61 / 868,739, filed August 22, 2013, and 61 / 790,866, filed March 15, 2013, the entire contents of which are hereby incorporated by reference in their entirety. technical field [0003] The present disclosure relates to sensors for chemical analysis, and to methods of making such sensors. Background technique [0004] Various types of chemical sensors have been used for the detection of chemical processes. One type is the chemically sensitive field effect transistor (chemFET). A chemFET includes a source and drain separated by a channel region, and a chemically sensitive region coupled to the channel region. The operation of the ChemFET is based on the modulation of the channel conductance, which is caused by the change of charge in the sensitive region due to the chemical reaction taking place nearby. Modulation of the channel conductance changes the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/414
CPCB01L2300/0636G01N27/4145G01N27/4148B01L3/502761B01L2200/0668B01L2300/0877G01N27/414
Inventor K.费夫J.欧文斯S.李J.巴斯蒂洛
Owner LIFE TECH CORP