vibration detector
A technology of vibration detector and detection element, which is applied in the direction of vibration measurement in solids, measuring vibration, instruments, etc., and can solve the problems of limited detection element locations and inability to install detection elements, etc.
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no. 1 approach
[0035] Such as figure 1 As shown, the vibration detector of this embodiment includes a vibration detection unit 1 and a control unit 2 . The vibration detection unit 1 includes a heat flux sensor 10 , a fixing table 20 arranged on the back surface 10 b side of the heat flux sensor 10 , and a rubber 30 and a weight 40 provided on the front surface 10 a side of the heat flux sensor.
[0036] Such as Figure 2 ~ Figure 4 As shown, the heat flux sensor 10 is a sensor as follows: the insulating base material 100, the surface protection member 110, and the back protection member 120 are integrated, and the first and second interlayer connection members 130, 140 are inside the integrated part. Alternate serial connection. Hereinafter, the structure of the heat flux sensor 10 is demonstrated concretely. Among them, in figure 2 In the illustration, the surface protection member 110 is omitted for easy understanding.
[0037] In the present embodiment, the insulating substrate 100...
no. 2 approach
[0085] In the first embodiment, the heat flux sensor 10 is attached to a flat surface, but in this embodiment, the heat flux sensor 10 is attached to a curved surface.
[0086] like Figure 7A As shown, in the vibration detection unit 1 of the present embodiment, the back surface 10 b of the heat flux sensor 10 is bonded to the surface (curved surface) of the rotating shaft 21 via the adhesive 50 . Therefore, the heat flux sensor 10 has a curved shape. Since the heat flux sensor 10 is flexible like the first embodiment, it can be attached to a curved surface in this way. On the other hand, rubber 30 is bonded to the surface 10 a of the heat flux sensor 10 , and the surface of the rubber 30 is in contact with the inner surface of the curved bearing 41 . However, the rubber 30 does not engage with the bearing 41 .
[0087] And, if Figure 7B As shown, when the bearing 41 vibrates in a direction (arrow direction in the figure) along the circumferential direction of the rotati...
no. 3 approach
[0090] In the first and second embodiments, the vibration detection unit 1 detects vibrations in a direction along the surface direction of the heat flux sensor 10 , but in this embodiment, the vibration detection unit 1 detects vibrations perpendicular to the surface direction of the heat flux sensor 10 . The direction of the vibration mode.
[0091] like Figure 8A As shown, the vibration detection part 1 of this embodiment is equipped with the heat flux sensor 10, the support body 22 which supports the one end of the heat flux sensor 10 in the plane direction, and the end provided in the plane direction of the heat flux sensor 10 and One end is the structure of the weight 42 at the other end of the opposite side. The structure of the heat flux sensor 10 is the same as that of the first embodiment.
[0092] like Figure 8B As shown, if the support body 22 vibrates in a direction perpendicular to the surface direction of the heat flux sensor 10 (arrow direction in the figu...
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