Inline deposition control apparatus and method of inline deposition control
A control equipment, series technology, applied in the direction of vacuum evaporation plating, coating, discharge tube, etc., can solve the problem of difficulty in correctly determining the thickness and so on
Inactive Publication Date: 2016-03-09
APPLIED MATERIALS INC
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Problems solved by technology
Typical layer systems consist of 2 to 10 layers, wherein, with higher numbers of layers, the correct determination of the thickness of the corresponding layers becomes increasingly difficult
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[0020] Reference will now be made in detail to various embodiments of the invention, one or more examples of which are illustrated in the drawings. In the following description of the drawings, the same reference numerals designate the same components. In general, only differences with respect to individual embodiments are described. Each example is provided by way of explanation of the invention, and each example is not intended as a limitation of the invention. Furthermore, features illustrated or described as part of one embodiment can be used on or in conjunction with other embodiments to yield a further embodiment. The description is intended to cover such modifications and variations.
[0021] The flexible substrate or mesh as used in the described embodiments is typically characterized in that it is bendable. The terms "flexible substrate" or "mesh" may be used synonymously with the term "strip". For example, a mesh as described in the embodiments herein may be a fo...
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Abstract
An inline deposition control apparatus for a vacuum deposition apparatus having one or more deposition sources for depositing one or more deposition layers on a substrate, includes one or more light sources adapted to illuminate the substrate having the one or more deposition layers; a detection arrangement adapted for spectrally resolved detection of a measurement signal, wherein the measurement signal is selected from at least one of: light reflected at the substrate having the one or more deposition layers, and light transmitted through the substrate having the one or more deposition layers; an evaluation unit to determine the respective thicknesses of the one or more layers based on the measurement signal; and a controller connected to the evaluation unit and connectable to the deposition apparatus for feed-back control of the deposition of the one or more deposition layers based on the determined thicknesses. Furthermore, a method of inline deposition control is provided.
Description
technical field [0001] Several embodiments of the present disclosure relate to in-line deposition control for a vacuum deposition apparatus and apparatus for controlling in-line deposition of a vacuum deposition apparatus. In particular, several embodiments relate to controlled in-line deposition onto flexible substrates, particularly flexible substrates for optical multilayer systems. Background technique [0002] In many applications, the deposition of several thin layers on flexible substrates is necessary. Typically, flexible substrates are coated in one or more chambers of a flexible substrate coating apparatus. Additionally, a batch of flexible substrates (eg, a roll of flexible substrates) may be disposed in one chamber of the substrate coating apparatus. Typically, the flexible substrate is coated in vacuum using a vacuum deposition technique (eg, physical vapor deposition or chemical vapor deposition). [0003] Roll-to-roll coating machines generally allow high t...
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IPC IPC(8): C23C14/54C23C14/56
CPCC23C14/562C23C14/547H01J37/347
Inventor H-G·洛茨
Owner APPLIED MATERIALS INC