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Device for measuring height and method for measuring developer nozzle height

A technology for measuring height and developing solution, which is applied in the direction of measuring devices, mechanical measuring devices, and mechanical devices, etc. It can solve the problems of unable to meet the process requirements, unable to measure accurately, plug gauge wear and deformation measurement results are affected, and reach the reading Convenience, easy operation, accurate results

Active Publication Date: 2018-02-06
WUHAN XINXIN SEMICON MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the plug gauge can only determine a range of heights and cannot be measured accurately, and sometimes cannot meet the process requirements when the critical dimensions are gradually reduced
Moreover, the wear and deformation of the plug gauge itself also has an impact on the measurement results

Method used

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  • Device for measuring height and method for measuring developer nozzle height
  • Device for measuring height and method for measuring developer nozzle height
  • Device for measuring height and method for measuring developer nozzle height

Examples

Experimental program
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Embodiment Construction

[0037] The principles and features of the present invention are described below in conjunction with the accompanying drawings, and the examples given are only used to explain the present invention, and are not intended to limit the scope of the present invention.

[0038] Such as figure 1 and figure 2 As shown, a device for measuring height includes a base plate 1, a hydraulic cylinder 2 is installed vertically at one end of the base plate 1, and a connecting rod 22 is arranged on the top of the first piston 21 of the hydraulic cylinder 2; the base plate 1 The other end of the linear guide rail 3 is vertically installed, and the linear guide rail 3 is provided with a slide block 31 that can move in the vertical direction; it also includes a measuring plate 4 parallel to the base plate 1; the measuring plate 4 One end is fixed on the connecting rod 22, and the other end is fixed on the slider 31; the hydraulic cylinder 2 communicates with the injector 6 through the communicat...

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Abstract

The invention relates to a device for measuring height and a method for measuring the height of the developer nozzle. The device is placed on the upper surface of the wafer, and the lower surface of the bottom plate is closely attached to the upper surface of the wafer; the developer nozzle Move to the spout position; push the second piston so that the upper surface of the measuring plate is close to the lower end of the developer nozzle; and read the height difference between the upper surface of the measuring plate and the lower surface of the bottom plate from the scale, which is The height of the developer nozzle relative to the crystal element makes the measurement of the height of the developer nozzle relative to the crystal element easy to operate and accurate in result.

Description

technical field [0001] The invention relates to the technical field of semiconductor photolithography, in particular to a device for measuring height and a method for measuring the height of a developer nozzle. Background technique [0002] In the semiconductor photolithography process, the height of the developer nozzle relative to the wafer is a key parameter in machine maintenance. If the height of the developer nozzle is too high or too low, or the level is not up to standard, it will not only affect the uniformity of the key dimensions of the graphics, but also cause process defects. [0003] Because of the irregular shape of the developer nozzle, its height cannot be directly measured by conventional means. At present, plug gauges are commonly used to measure the developer nozzle height, that is, whether a plug gauge with a specific thickness can pass through the gap between the developer nozzle and the wafer can determine whether the developer nozzle height is within...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B5/06
CPCG01B5/061
Inventor 詹云
Owner WUHAN XINXIN SEMICON MFG CO LTD
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