A device suitable for multi-environment vacuum testing
A multi-environment, vacuum technology, applied in the field of electronics, can solve problems such as the lack of integrated equipment, and achieve the effect of in-situ stretching/bending and compact structure
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[0029] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood. The specific embodiments described here are only used to explain the invention, not to limit the invention.
[0030] see Figure 1 to Figure 5 , the application provides a device suitable for multi-environment vacuum testing, including:
[0031] A cavity 1 with multiple flange interfaces, the multiple flange interfaces are used to connect each module unit, wherein specifically, in any embodiment, unless otherwise specified, the flange interfaces adopt CF flanges
[0032] An environmental functional unit for providing multiple test environments in the cavity; a measurement unit for measuring experimental data, the environmental functional unit and the measurement unit are connected to the cavity 1 through a flange interface;
[0033] A sample placement base 42 disposed at the bottom of the cavity 1, the sample...
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