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A device suitable for multi-environment vacuum testing

A multi-environment, vacuum technology, applied in the field of electronics, can solve problems such as the lack of integrated equipment, and achieve the effect of in-situ stretching/bending and compact structure

Active Publication Date: 2019-09-27
SUN YAT SEN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In the current research, the methods of multi-physics field coupling test in controllable vacuum and chemical environment are still to be completed. Due to the limitation of equipment, the existing equipment only has the ability of materials under the coupling effect of individual physical fields such as force-electricity and optoelectronics. performance testing function, there is no equipment integrated with chemical environment control, force-electricity-optical-thermal coupling test

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  • A device suitable for multi-environment vacuum testing
  • A device suitable for multi-environment vacuum testing
  • A device suitable for multi-environment vacuum testing

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Embodiment Construction

[0029] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood. The specific embodiments described here are only used to explain the invention, not to limit the invention.

[0030] see Figure 1 to Figure 5 , the application provides a device suitable for multi-environment vacuum testing, including:

[0031] A cavity 1 with multiple flange interfaces, the multiple flange interfaces are used to connect each module unit, wherein specifically, in any embodiment, unless otherwise specified, the flange interfaces adopt CF flanges

[0032] An environmental functional unit for providing multiple test environments in the cavity; a measurement unit for measuring experimental data, the environmental functional unit and the measurement unit are connected to the cavity 1 through a flange interface;

[0033] A sample placement base 42 disposed at the bottom of the cavity 1, the sample...

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Abstract

The invention provides equipment suitable for a multi-environment vacuum test. The equipment comprises a cavity with a plurality of flange connectors, an environment function unit for providing a plurality of types of testing environments for the cavity, a measuring unit for measuring experiment data, a sample storing base arranged at the bottom in the cavity and a first sample clamping unit arranged on the sample storing base, wherein the environment function unit and the measuring unit are connected with the cavity through the flange connectors; the sample storing base is provided with a plurality of threaded through holes; an opening is formed in one side of the cavity; a sealing cover which is movably connected with the cavity to form a sealed structure is arranged at the opening. The equipment provided by the invention intensively integrates various necessary conditions for the test, has a compact structure and can realize the controlling of in-situ stretching / bending, temperature change, ultraviolet excitation and chemical environments; meanwhile, a corresponding physical property test is performed.

Description

technical field [0001] The invention relates to the field of electronic technology, and is a device suitable for multi-environment vacuum testing. Background technique [0002] With the development of material science and electronic technology, many materials have been applied to gas sensors. Gas sensors can respond to different gases according to their own properties, especially some toxic and harmful gases, which can be monitored by gas sensors to reduce safety hazards. On the other hand, the properties of certain materials can be controlled by changing the ambient atmosphere and air pressure. Therefore, it is of great significance to systematically study the response of materials to various atmospheres and the characteristics of materials in various chemical environments. At the same time, due to the development of materials and in-depth research on material properties, the single property of materials is far from meeting the application requirements of materials, and t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N3/08G01N3/20G01N3/02G01N27/26G01N27/00G01N35/00
Inventor 郑跃熊伟明邢未未陈云
Owner SUN YAT SEN UNIV