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magnetometer

A magnetometer and displacement technology, applied in the direction of the size/direction of the magnetic field, can solve the problem of not providing the Z direction

Inactive Publication Date: 2019-02-19
SAGATEK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

But the invention does not provide the Z direction, that is, the magnetic quantity measurement perpendicular to the XY plane direction

Method used

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Embodiment Construction

[0042] The content of the present invention will be described below based on the preferred examples of the present invention. However, it must be stated that the preferred examples of the present invention are only used to illustrate the preferred implementation of the present invention. The scope of the present invention is not limited to the examples contained in the specification.

[0043] figure 1 It is a plan view of the magnetometer structure made according to the present invention. As shown in the figure, the magnetometer structure 100 includes a proof mass 10 and two sets of finger electrode structures 21 , 22 on both sides thereof. The figure shows that the proof mass 10 and the two sets of finger electrode structures 21 and 22 are structures manufactured by a standard CMOS process, and the proof mass 10 and the two sets of finger electrode structures 21 and 22 are electrically isolated by spaces 21a and 22a respectively. . If the structure is prepared by a standa...

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Abstract

The invention relates to a magnetometer. The magnetometer comprises a suspension quality block, a set of Y-direction displacement detection electrodes, a set of Z-direction displacement detection electrodes and a current supply module, wherein the quality block, the Y-direction displacement detection electrodes and the Z-direction displacement detection electrodes respectively comprise multiple metal layers and dielectric layers between any two metal layers, portions of the quality block which respectively correspond to the Y-direction displacement detection electrodes and the Z-direction displacement detection electrodes respectively have at least two metal layers connected through through holes, the Y-direction displacement detection electrodes comprise two sets of electrodes, each set comprises at least two metal layers connected through the through holes, the Z-direction displacement detection electrodes comprise two sets of electrodes, each set comprises at least two metal layers connected through the through holes, and the current supply module supplies selectable currents respectively passing through the quality block along the X direction or the Y direction.

Description

technical field [0001] The invention relates to a miniature magnetometer, in particular to a miniature magnetometer capable of simultaneously measuring three-axis magnetic quantities. Background technique [0002] Miniature magnetometers are widely used components such as smart phones, wearable devices and Internet of Things-IOT-devices. Miniature magnetometers can also be used in other engineering, scientific and industrial fields. To provide magnetometry functionality in modern applications, miniature magnetometers must be highly integrated, consume low power and provide accurate magnetic / magnetic field measurements. [0003] Among various miniature magnetometers, the magnetometer made by applying the principle of the Lorentz forces is more practical. Because this miniature magnetometer can be fabricated in standard CMOS process. The new micro-magnetometer structure is based on the principle of Lorentz force. [0004] A magnetometer applying the Lorentz force basically...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R33/02
Inventor 温瓌岸江泰维
Owner SAGATEK