A Manipulator Offset Monitoring System

Abstract

The invention provides a manipulator offset monitoring system. The manipulator comprises a driven body, a driver, a positioning piece, a detection device and a control device, wherein the driven body comprises a mechanical finger for bearing a substrate and a mechanical arm for connecting the mechanical finger and the driver; the driver is used for driving the driven body to move; the positioning piece is arranged on the driven body; when the manipulator is located at a monitoring working position, the detection device detects information at the detection position and sends the information to the control device, wherein the detection position is the position of the positioning piece detected by the detection device when the manipulator is accurately located at the monitoring working position; and the control device detects whether the information detected by the detection device changes in relative to the information detected when the manipulator is accurately located at the monitoring working position to judge whether offset happens to the manipulator. The system of the invention can solve problems that artificial detection is time-consuming, labor-consuming, low in efficiency and untimely in detection, and the stability, the reliability and the process efficiency in the case of substrate transmission can be improved.

Description

technical field [0001] The invention belongs to the field of semiconductor equipment manufacturing, and in particular relates to a manipulator offset monitoring system. Background technique [0002] In the field of semiconductor manufacturing, the pick-and-place chip is usually carried out at a preset pick-and-place position by means of a manipulator. In practical applications, it is found that after the manipulator works for a long time, due to the influence of its own hardware, there is often an offset between the manipulator and the pick-and-place position, and the offset direction of the pick-and-place process is the same and the offset is almost the same. That is, the entire robot arm has shifted. [0003] Since the manipulator is set in a vacuum-tight transmission chamber, and its transmission process is generally invisible, it can only be known that the manipulator has deviated when it has deviated greatly and caused an abnormal alarm for picking and placing slices, ...

AI Technical Summary

Problems solved by technology

[0006] The present invention aims to solve the technical problems existing in the prior art, and provides a manipulator offset monitoring system, which can solve the problems of time-consuming, laborious, inefficient and untimely detection of manual detection, thereby improving the stability of substrate transmission , reliability and process efficiency, which in turn can improve economic benefits

Images