Vacuum evaporation heating device

Abstract

The invention provides a vacuum evaporation heating device. The vacuum evaporation heating device comprises a heating device outer wall (3), a crucible (1) arranged inside the heating device outer wall (3) and a crucible cover (2) arranged on the crucible (1), wherein a first heating coil (11) is arranged at the periphery corresponding to the crucible (1) and the crucible cover (2) between the crucible (1) and the heating device outer wall (3); a nozzle (20) penetrating the upper surface and the lower surface of the crucible cover (2) is formed in the center of the crucible cover (2), and a second heating coil (21) is arranged at the periphery corresponding to the nozzle (20) on the crucible cover (2); and the first heating coil (11) and the second heating coil (21) are respectively electrically connected with a power supply and can be individually controlled for carrying out heating. The vacuum evaporation heating device has the advantages that horizontal radial temperature difference of the crucible can be effectively reduced, hole is prevented from being blocked by material, diameter can be designed to be larger, material placing amount is increased, cavity opening frequency is reduced, and production efficiency is improved; and structure is simple, and the vacuum evaporation heating device is easy to produce.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a vacuum evaporation heating device. Background technique [0002] Organic Light-Emitting Diode (OLED) is known as the next-generation display technology, which has excellent display performance, especially self-illumination, simple structure, ultra-thin, fast response, wide viewing angle, low power consumption and flexible display properties. At present, the mass-produced OLED manufacturing technology adopts the method of vacuum evaporation to prepare OLED material thin films. [0003] During evaporation in the vacuum evaporation chamber, the material is placed in the crucible, and the crucible is placed in the heating device. When heated to the evaporation temperature, the material is vaporized, and the vaporized molecules fly out from the nozzle of the crucible cover and deposit on the substrate to form a solid film. If the temperature is not properly controlled and the tem...

AI Technical Summary

Problems solved by technology

At present, there is no special technology to solve the problem of the horizontal and radial temperature difference of the crucible. It is also due to the limitation of the horizontal and radial temperature difference that the diameter of the crucible cannot be made larger, because the larger the diameter of the crucible, the greater the radial temperature difference. , the easier it is to plug holes

This limits the amount of material placed in the crucible, which is not conducive to reducing the frequency of refilling and other machine maintenance, which is not conducive to the improvement of production efficiency.

Images