Unit forevacuum and leak detector integration system for molecular pump

Abstract

The invention discloses a molecular pump unit pre-evacuation and molecular pump leak detector integrated system, including a vacuum chamber, the vacuum chamber is connected to a product vacuum valve through a pipeline, the product vacuum valve is connected to a high vacuum baffle valve through a pipeline, and a high vacuum baffle The valve is connected to the high-vacuum solenoid through the pipeline, the high-vacuum solenoid is connected to the molecular pump through the pipeline, the molecular pump is connected to the manual flapper valve through the pipeline, the manual flapper valve is connected to the electromagnetic charging valve through the pipeline, and the electromagnetic charging valve is connected to the front rotary vane pump, molecular pump The pipeline between the manual flapper valve is connected to the leak detection valve through the pipeline, and the leak detection valve is connected to the leak detector through the pipeline; the pipeline between the molecular pump and the manual flapper valve is connected to the bypass pre-pumping flapper valve through the pipeline, The bypass pre-extraction baffle valve is connected to the pipeline between the high vacuum baffle valve and the high vacuum solenoid valve through a pipeline. The invention solves the problems of long evacuation and leak detection reaction time in the manufacturing process of the low-temperature pressure vessel and the problems of energy consumption and man-hour waste in the interlayer high-vacuum evacuation process.

Description

technical field [0001] The invention relates to an integrated system for pre-evacuation of a molecular pump unit and a molecular pump leak detector. Background technique [0002] In the current manufacturing process of cryogenic pressure vessels, rotary vane vacuum pumps are generally used for pre-evacuation of inner containers and interlayers. When a certain vacuum degree is reached, the system is connected to a leak detector for leak detection. In the actual operation process, the operator uses the shunt method or the no-shunt method to detect. In the detection process of the shunt method, because the sealing of the rotary vane mechanical pump is not good, it is easy to cause false detection. In the splitless detection method, because the pumping speed of the leak detector itself is very small, the reaction time is too long and a lot of man-hours are wasted. [0003] In the process of pumping high vacuum in the interlayer of cryogenic pressure vessels, oil diffusion vacu...

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Problems solved by technology

[0004] In order to solve the problem of long evacuation and leak detection reaction time in the manufacturing process of cryogenic pressure vessels and the energy consumption and waste of man-hours in the interlayer high vacuum pumping process, the purpose of the present invention is to provide a molecular pump unit pre-vacuum and molecular pump detection. Leak meter integrated system

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