A kind of preparation method of bipolar nano film memristor
A nano-thin film and memristor technology, which is applied in the field of preparation of single-layer nano-thin film memristor, can solve the problems of unrealized commercial production, complex manufacturing process, and inability to carry out hardware experiments, etc.
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[0114] Concrete preparation method comprises the following steps:
[0115] The prepared Sr(Ti 1-x Mg x )O 3-x Target material, using pulsed laser method or magnetron sputtering method, Sr(Ti 1- x Mg x )O 3-x deposited on the surface of the lower electrode;
[0116] Heat treatment at 700-900°C for 10-30 minutes to obtain a chemical composition of Sr(Ti 1-y x y )O 3-y single-layer ceramic nano-film;
[0117] With the target material made of Au, Ag or Pt, Au, Ag or Pt is deposited on the above-mentioned chemical composition of Sr(Ti) by pulsed laser method or magnetron sputtering method. 1-x Mg x )O 3-x On the single-layer ceramic nano film, the upper electrode is prepared, which is the finished product. The electrode thickness is 10nm-50um.
[0118]3, embodiment 13 adopts and embodiment 1 Sr(Ti 1-y x y )O 3-y The raw material formula of the target is the same; moreover, the electrode is plated by printing method using In-Ga electrode solution. Refer to Examples...
Embodiment 1
[0126] Preparation of Sr(Ti 1-x Mg x )O 3-x The raw material formula of the target is: Sr(NO 3 ) 2 : Ti(OC 4 h 9 ) 4 : Mg(NO 3 ) 2 =100:99:1 (molar ratio).
Embodiment 2
[0128] Preparation of Sr(Ti 1-x Mg x )O 3-x The raw material formula of the target is: Sr(NO 3 ) 2 : Ti(OC 4 h 9 ) 4 : Mg(NO 3 ) 2 =100:98:2 (molar ratio).
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