Method for preparing bipolar nano-film memristor
A nano-thin film and memristor technology, which is applied in the field of preparation of single-layer nano-thin film memristor, can solve the problems of hard memristor material, commercial production and inability to carry out hardware experiments, etc.
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[0114] The specific preparation method includes the following steps:
[0115] Sr(Ti 1-x Mg x )O 3-x Target material, using pulsed laser method or magnetron sputtering method, Sr(Ti 1-x Mg x )O 3-x Deposited on the surface of the lower electrode;
[0116] Heat treatment at 700-900℃ for 10-30 minutes, the chemical composition is Sr(Ti 1-y X y )O 3-y Single-layer ceramic nano film;
[0117] Using the target material made of Au, Ag or Pt, using pulsed laser method or magnetron sputtering method, deposit Au, Ag or Pt on the above chemical composition of Sr(Ti 1-x Mg x )O 3-x On the single-layer ceramic nano film, the electrode is prepared, and the finished product is obtained. The electrode thickness is 10nm-50um.
[0118] 3. Embodiment 13 adopts the Sr(Ti 1-y X y )O 3-y The target material has the same raw material formula; and the In-Ga electrode solution is used by the printing method to plate the electrode. Refer to Examples 8-10 for specific preparation methods and steps.
[0119] 4. ...
Embodiment 1
[0126] Preparation of Sr(Ti 1-x Mg x )O 3-x The raw material formula of the target is: Sr(NO 3 ) 2 : Ti(OC 4 H 9 ) 4 : Mg(NO 3 ) 2 =100:99:1 (molar ratio).
Embodiment 2
[0128] Preparation of Sr(Ti 1-x Mg x )O 3-x The raw material formula of the target is: Sr(NO 3 ) 2 : Ti(OC 4 H 9 ) 4 : Mg(NO 3 ) 2 =100:98:2 (molar ratio).
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