A based on sr(ti 1‑x mg x )o 3‑x Preparation method of single-layer nano-film memristor
A nano-thin film and memristor technology, which is applied in the field of preparation of single-layer nano-thin film memristor, can solve the problems of complex manufacturing process, harsh process conditions, harsh conditions, etc.
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[0169] Concrete preparation method comprises the following steps:
[0170] The target material is Au, Ag or Pt, and Au, Ag or Pt is deposited on the above-mentioned chemical composition of Sr(Ti) by thermal spraying method. 1-x Mg x )O 3-xOn the single-layer ceramic nano film, the upper electrode is prepared;
[0171] Finally, heat treatment at 700-900°C for 10-30 minutes to obtain a chemical composition of Sr(Ti 1-y x y )O 3-y On the single-layer ceramic nano film, the finished product is obtained. The electrode thickness is 10nm-50um.
Embodiment 1
[0174] Preparation of Sr(Ti 1-x Mg x )O 3-x The raw material formula of the target is: Sr(CH 3 COO) 2 :C 16 h 36 o 4 Ti:Mg(CH 3 COO) 2 4H 2 O=100:99:1 (molar ratio).
Embodiment 2
[0176] Preparation of Sr(Ti 1-x Mg x )O 3-x The raw material formula of the target is: Sr(CH 3 COO) 2 :C 16 h 36 o 4 Ti:Mg(CH 3 COO) 2 4H 2 O=100:98:2 (molar ratio).
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