A variety of gas sensing systems and detection methods based on two-dimensional photonic crystals
A two-dimensional photonic crystal and photonic crystal technology, which is used in measurement devices, material analysis by optical means, instruments, etc., can solve problems such as limiting the use of sensing systems, and achieve simple sensing units, high detection accuracy, and stable performance. reliable results
Active Publication Date: 2019-02-01
XI'AN PETROLEUM UNIVERSITY
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Problems solved by technology
[0003] Among the existing optical detection methods, the method based on gas characteristic spectrum detection is the most mature and widely used, but the large volume of the gas chamber in this detection system limits the use of this type of sensing system
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[0020] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0021] The present invention adopts the photonic crystal waveguide manufacturing method mentioned in the patent document with publication number (CN103592720 A) to manufacture the resonant cavity and parallel air waveguide designed in the present invention.
[0022] The production method is:
[0023] Clean the surface of the SOI substrate, use the focused ion etching method to etch the input-output connection waveguide on the top silicon surface of the SOI substrate, dry the SOI substrate with N2, and coat the substrate surface with PMMA positive photoresist; After throwing the film on the SOI substrate, put the substrate on the glue baking table and bake it to complete the pre-baking treatment; put the SOI substrate after the glue is exposed under the electron beam, and the exposure pattern includes the resonant cavity structure and the air slit For the two...
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The invention discloses a two-dimensional photonic crystal-based multi-gas sensing system. The system comprises a tunable optical generator, a two-dimensional photonic crystal and an optical power detector. Three different resonant cavities are arranged on the two-dimensional photonic crystal. Two parallel photonic crystal waveguides are arranged below and above the resonant cavities. Light wave produced through the tunable optical generator is guided into the inlet waveguide of the two-dimensional photonic crystal through optical fibers, then is coupled and enters the resonant cavities, and the light with resonant wavelength is coupled and enters the outlet waveguide of the two-dimensional photonic crystal and then is derived from the two-dimensional photonic crystal through an optical fiber. The optical power detector is located at a light wave outlet optical fiber end. The detection method comprises 1, introducing light into the photonic crystal waveguide, 2, coupling the input light wave and feeding the light wave into the resonant cavities, 3, producing resonance absorption under action of resonant wave, the outlet waveguide and gas to be detected, and 4, measuring the output light power. The sensing unit is simple and has a small volume, stable and reliable performances and a high detection precision. The sensing system can realize synchronous detection of concentrations of multiple types of gas.
Description
technical field [0001] The invention belongs to the technical field of gas sensors, and specifically relates to a variety of gas sensing systems and detection methods based on two-dimensional photonic crystals. The sensing system is constructed by optical fibers, optical fiber tunable lasers, photonic crystal resonators and photonic crystal waveguides to realize methane , carbon dioxide, hydrogen sulfide and other gases sensing measurement. Background technique [0002] Hazardous environments are high-risk areas where safety accidents occur frequently. Accidents involving gas explosions, natural gas pipeline explosions, nitrogen oxides, sulfides, hydrogen sulfide and other toxic and harmful gases that cause casualties and major economic losses occur from time to time. Therefore, fast, sensitive and effective real-time gas detection methods are of great significance to prevent major accidents from happening in human production practice. Optical detection methods have unique ...
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IPC IPC(8): G01N21/17
CPCG01N21/17
Inventor 傅海威闫旭李岩丁继军刘颖刚刘钦鹏邵敏马成举文静
Owner XI'AN PETROLEUM UNIVERSITY