A multi-type line width measurement method and device
A measurement method and multiple types of technologies, applied in measurement devices, optical devices, instruments, etc., can solve problems such as large errors, inability to measure line width and size, and low efficiency.
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[0063] The embodiment of the present invention provides a multi-type line width measurement method and device, which solves the current technical problems of large error and low efficiency when the human eye measurement is used, and the qualitative on-off test cannot measure the line width size The technical problem of the actual value of , and the technical problem of X-ray imaging effect on thin wires becomes worse.
[0064] In order to make the purpose, features and advantages of the present invention more obvious and understandable, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the following The described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without...
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