Quantitative detection method for surface defects of optical element with high-order curved surface

Abstract

The invention discloses a quantitative detection method for surface defects of an optical element with a high-order curved surface. The method comprises following steps: optimizing a sub-aperture scanning path and determining sub-aperture spatial position distribution; collecting flat sub-aperture images based on the microscopic scattering dark-field imaging principle; reconstructing a sub-aperture three-dimensional image of the high-order curved surface through three-dimensional sub-aperture correction of the high-order curved surface; acquiring a full-aperture two-dimensional projective image of the high-order curved surface through orthographic projection transformation and full-aperture splicing, and extracting defect characteristics under low magnification; accurately positioning the defects and performing high-magnification detection, and extracting defect characteristics under high magnification; counting and analyzing characteristic information to generate evaluation data. With the adoption of the method, automatic quantitative detection of the surface defects of the optical element with the high-order curved surface is realized, the detection efficiency and the detection precision are greatly improved, objective and reliable numerical basis is provided for machining and using of the optical element with the high-order curved surface, and a powerful means is provided for improving advanced optical fabrication ultra-precision machining technologies and studying various ultra-precision machining technologies.

Description

technical field [0001] The invention belongs to the technical field of machine vision detection, and in particular relates to a quantitative detection method for surface defects of high-order curved optical elements. Background technique [0002] The digital quantitative detection of surface defects is an important part of the sustainable development of advanced optical manufacturing ultra-precision processing technology. When the surface shape and roughness are well controlled, surface defects are increasingly restricting the ultra-precision processing technology and level of advanced optical manufacturing. The digital quantitative detection of surface defects of optical components will provide a powerful means for improving advanced optical manufacturing ultra-precision processing technology and researching various ultra-precision processing technologies. At the same time, in many optical-related ultra-high-precision fields, such as space optics, inertial confinement fusio...

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Problems solved by technology

However, the standards of the visual method are not uniform and have poor repeatability, and are easily affected by the physical conditions of the inspectors, which is too subjective.

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