Preparation method of crystalline silicon solar cell textured structure

Abstract

The invention discloses a preparation method of a crystalline silicon solar cell textured structure. The preparation method comprises the following steps: (1) forming a porous medium layer structure on the surface of a silicon wafer; (2) and then carrying out surface etching by using a first chemical corrosive liquid so that the crystalline silicon solar cell textured structure can be obtained. The first chemical corrosive liquid is a mixed solution of hydrofluoric acid and an oxidizing agent, wherein the molar ratio of the hydrofluoric acid to the oxidizing agent is 1: (1 to 5). According to the preparation method, the proportion of HF to HNO3 is adjusted, the generation is beneficial for diffusing a gettering loosened porous silicon layer besides hole enlarging and metal particle removal; the loosened porous silicon layer has extremely excellent gettering performance, and the recombination of PN junctions can be greatly reduced through subsequent high-temperature diffusion and gettering, so that the open-circuit voltage and battery conversion efficiency are improved.

Description

technical field [0001] The invention relates to a method for preparing a textured surface structure of a crystalline silicon solar cell, belonging to the technical field of solar cells. Background technique [0002] With the wide application of solar cell components, photovoltaic power generation occupies an increasingly important proportion in new energy and has achieved rapid development. Among the currently commercialized solar cell products, crystalline silicon (monocrystalline and polycrystalline) solar cells have the largest market share, maintaining a market share of more than 85%. [0003] At present, in the production process of solar cells, the textured structure on the surface of silicon wafers can effectively reduce the surface reflectance of solar cells, which is one of the important factors affecting the photoelectric conversion efficiency of solar cells. In order to obtain a good textured structure on the surface of crystalline silicon solar cells to achieve ...

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Problems solved by technology

Invention patent application WO2014120830 (A1) discloses a method for preparing crystalline silicon nano-texture, which controls the shape of nano-texture by annealing, but the method is complicated and not conducive to the needs of industrial production

[0006] However, it has been found in practical applications that the above-mentioned method has the following problems: the second chemical etching solution in the step (3) of the above-mentioned method is lye, and its effect is mainly to remove the loose porous silicon structure of the surface layer, exposing the nano velvet below surface structure

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